diff --git a/sky130/klayout/sky130.lydrc b/sky130/klayout/sky130.lydrc deleted file mode 100644 index 4fac1601..00000000 --- a/sky130/klayout/sky130.lydrc +++ /dev/null @@ -1,918 +0,0 @@ - - - - - drc - - - - false - false - - true - drc_scripts - tools_menu.drc.end - dsl - drc-dsl-xml - # -# DRC for SKY130 according to : -# https://skywater-pdk.readthedocs.io/en/latest/rules/periphery.html -# https://skywater-pdk.readthedocs.io/en/latest/rules/layers.html -# -# Distributed under GNU GPLv3: https://www.gnu.org/licenses/ -# -# History : -# 2020-10-04 : v1.0 : initial release -# -########################################################################################## - -# optionnal for a batch launch : klayout -b -rd input=my_layout.gds -rd report=sky130_drc.txt -r drc_sky130.drc -if $input - source($input) -end - -if $report - report("SKY130 DRC runset", $report) -else - report("SKY130 DRC runset", File.join(File.dirname(RBA::CellView::active.filename), "sky130_drc.txt")) -end - -AL = true # do not change -CU = false # do not change -# choose betwen only one of AL or CU back-end flow here : -backend_flow = AL - -# enable / disable rule groups -FEOL = false # front-end-of-line checks -BEOL = true # back-end-of-line checks -OFFGRID = true # manufacturing grid/angle checks - -# klayout setup -######################## -# use a tile size of 1mm - not used in deep mode- -tiles(1000.um) -# use a tile border of 10 micron: -tile_borders(1.um) -#no_borders - -# hierachical -deep - -# use 4 cpu cores -threads(4) -# if more inof is needed, set true -verbose(true) - -# layers definitions -######################## - -# all except purpose (datatype) 5 -- label and 44 -- via -li_wildcard = "67/0-4,6-43,45-*" -mcon_wildcard = "67/44" - -m1_wildcard = "68/0-4,6-43,45-*" -via_wildcard = "68/44" - -m2_wildcard = "69/0-4,6-43,45-*" -via2_wildcard = "69/44" - -m3_wildcard = "70/0-4,6-43,45-*" -via3_wildcard = "70/44" - -m4_wildcard = "71/0-4,6-43,45-*" -via4_wildcard = "71/44" - -m5_wildcard = "72/0-4,6-43,45-*" - -diff = input(65, 20) -tap = polygons(65, 44) -nwell = polygons(64, 20) -dnwell = polygons(64, 18) -pwbm = polygons(19, 44) -pwde = polygons(124, 20) -natfet = polygons(124, 21) -hvtr = polygons(18, 20) -hvtp = polygons(78, 44) -ldntm = polygons(11, 44) -hvi = polygons(75, 20) -tunm = polygons(80, 20) -lvtn = polygons(125, 44) -poly = polygons(66, 20) -hvntm = polygons(125, 20) -nsdm = polygons(93, 44) -psdm = polygons(94, 20) -rpm = polygons(86, 20) -urpm = polygons(79, 20) -npc = polygons(95, 20) -licon = polygons(66, 44) - -li = polygons(li_wildcard) -mcon = polygons(mcon_wildcard) - -m1 = polygons(m1_wildcard) -via = polygons(via_wildcard) - -m2 = polygons(m2_wildcard) -via2 = polygons(via2_wildcard) - -m3 = polygons(m3_wildcard) -via3 = polygons(via3_wildcard) - -m4 = polygons(m4_wildcard) -via4 = polygons(via4_wildcard) - -m5 = polygons(m5_wildcard) - -pad = polygons(76, 20) -nsm = polygons(61, 20) -capm = polygons(89, 44) -cap2m = polygons(97, 44) -vhvi = polygons(74, 21) -uhvi = polygons(74, 22) -npn = polygons(82, 20) -inductor = polygons(82, 24) -vpp = polygons(82, 64) -pnp = polygons(82, 44) -lvs_prune = polygons(84, 44) -ncm = polygons(92, 44) -padcenter = polygons(81, 20) -mf = polygons(76, 44) -areaid_sl = polygons(81, 1) -areaid_ce = polygons(81, 2) -areaid_fe = polygons(81, 3) -areaid_sc = polygons(81, 4) -areaid_sf = polygons(81, 6) -areaid_sw = polygons(81, 7) -areaid_sr = polygons(81, 8) -areaid_mt = polygons(81, 10) -areaid_dt = polygons(81, 11) -areaid_ft = polygons(81, 12) -areaid_ww = polygons(81, 13) -areaid_ld = polygons(81, 14) -areaid_ns = polygons(81, 15) -areaid_ij = polygons(81, 17) -areaid_zr = polygons(81, 18) -areaid_ed = polygons(81, 19) -areaid_de = polygons(81, 23) -areaid_rd = polygons(81, 24) -areaid_dn = polygons(81, 50) -areaid_cr = polygons(81, 51) -areaid_cd = polygons(81, 52) -areaid_st = polygons(81, 53) -areaid_op = polygons(81, 54) -areaid_en = polygons(81, 57) -areaid_en20 = polygons(81, 58) -areaid_le = polygons(81, 60) -areaid_hl = polygons(81, 63) -areaid_sd = polygons(81, 70) -areaid_po = polygons(81, 81) -areaid_it = polygons(81, 84) -areaid_et = polygons(81, 101) -areaid_lvt = polygons(81, 108) -areaid_re = polygons(81, 125) -areaid_ag = polygons(81, 79) -poly_rs = polygons(66, 13) -diff_rs = polygons(65, 13) -pwell_rs = polygons(64, 13) -li_rs = polygons(67, 13) -cfom = polygons(22, 20) - - -# Define a new custom function that selects polygons by their number of holes: -# It will return a new layer containing those polygons with min to max holes. -# max can be nil to omit the upper limit. -class DRC::DRCLayer - def with_holes(min, max) - new_data = RBA::Region::new - self.data.each do |p| - if p.holes >= (min || 0) && (!max || p.holes <= max) - new_data.insert(p) - end - end - DRC::DRCLayer::new(@engine, new_data) - end -end - -# DRC section -######################## -info("DRC section") - -if FEOL -info("FEOL section") -gate = diff & poly - -# dnwell -dnwell.width(3.0, euclidian).output("dnwell.2", "dnwell.2 : min. dnwell width : 3.0um") -dnwell.not(uhvi).not(areaid_po).isolated(6.3, euclidian).output("dnwell.3", "dnwell.3 : min. dnwell spacing : 6.3um") -dnwell.and(pnp).output("dnwell.4", "dnwell.4 : dnwell must not overlap pnp") -dnwell.and(psdm).edges.not(psdm.edges).output("dnwell.5", "p+ must not straddle dnwell") -# dnwell.6 rue not coded - -# nwell -nwell.width(0.84, euclidian).output("nwell.1", "nwell.1 : min. nwell width : 0.84um") -nwell.isolated(1.27, euclidian).output("nwell.2a", "nwell.2a : min. nwell spacing (merged if less) : 1.27um") -# rule nwell.4 is suitable for digital cells -#nwell.not(uhvi).not(areaid_en20).not_interacting(tap.and(licon).and(li)).output("nwell.4", "nwell4 : all nwell exempt inside uhvi must contain a n+tap") -nwell.enclosing(dnwell.not(uhvi).not(areaid_po), 0.4, euclidian).output("nwell.5", "nwell.5 : min. nwell enclosing dnwell exempt unside uhvi : 0.4um") -dnwell.enclosing(nwell.not(uhvi), 1.03, euclidian).output("nwell.6", "nwell.6 : min. dnwell enclosing nwell exempt unside uhvi : 1.03um") -dnwell.separation(nwell, 4.5, euclidian).output("nwell.7", "nwell.7 : min. dnwell separation nwell : 4.5um") - -# pwbm -pwbm.not(uhvi).output("pwbm", "pwbm must be inside uhvi") -dnwell.and(uhvi).edges.not(pwbm).output("pwbm.4", "pwbm.4 : dnwell inside uhvi must be enclosed by pwbm") - -# pwde -pwde.not(pwbm).output("pwdem.3", "pwdem.3 : pwde must be inside pwbm") -pwde.not(uhvi).output("pwdem.4", "pwdem.4 : pwde must be inside uhvi") -pwde.not(dnwell).output("pwdem.5", "pwdem.5 : pwde must be inside dnwell") - -# hvtp -#hvtp.not(nwell).output("hvtp", "hvtp must inside nwell") -hvtp.width(0.38, euclidian).output("hvtp.1", "hvtp.1 : min. hvtp width : 0.38um") -hvtp.isolated(0.38, euclidian).output("hvtp.2", "hvtp.2 : min. hvtp spacing : 0.38um") -hvtp.enclosing(gate.and(psdm), 0.18, euclidian).output("hvtp.3", "hvtp.3 : min. hvtp enclosure of pfet gate : 0.18um") -hvtp.separation(gate.and(psdm), 0.18, euclidian).output("hvtp.4", "hvtp.4 : min. hvtp spacing pfet gate: 0.18um") -hvtp.with_area(0..0.265).output("hvtp.5", "hvtp.5 : min. hvtp area : 0.265um²") - -# hvtr -hvtr.width(0.38, euclidian).output("hvtr.1", "hvtr.1 : min. hvtr width : 0.38um") -hvtr.isolated(0.38, euclidian).output("hvtr.2", "hvtr.2 : min. hvtr spacing : 0.38um") - -# lvtn -lvtn.width(0.38, euclidian).output("lvtn.1", "lvtn.1 : min. lvtn width : 0.38um") -lvtn.isolated(0.38, euclidian).output("lvtn.2", "lvtn.2 : min. lvtn spacing : 0.38um") -lvtn.separation(diff.and(poly).not(uhvi), 0.18, euclidian).output("lvtn.3a", "lvtn.3a : min. lvtn spacing to gate : 0.18um") -lvtn.separation(diff.and(nwell).not(poly), 0.235, projection).output("lvtn.3b", "lvtn.3b : min. lvtn spacing to pfet s/d : 0.18um") -lvtn.enclosing(gate.not(uhvi), 0.18, euclidian).output("lvtn.4b", "lvtn.4b : min. lvtn enclosing to gate : 0.18um") -lvtn.separation(hvtp, 0.38, euclidian).output("lvtn.9", "lvtn.9 : min. lvtn spacing hvtp : 0.38um") -nwell.not_interacting(gate.and(nwell.not(hvi).not(areaid_ce))).enclosing(lvtn.not(uhvi), 0.18, euclidian).polygons.without_area(0).output("lvtn.4b", "lvtn.4b : min. lvtn enclosure of gate : 0.18um") -lvtn.separation(nwell.inside(areaid_ce), 0.38, euclidian).output("lvtn.12", "lvtn.12 : min. lvtn spacing nwell inside areaid.ce : 0.38um") -lvtn.with_area(0..0.265).output("lvtn.13", "lvtn.13 : min. lvtn area : 0.265um²") - -# ncm -ncm.and(tap.and(nwell).or(diff.not(nwell))).output("ncm.x.3", "ncm.x.3 : ncm must not overlap n+diff") -ncm.width(0.38, euclidian).output("ncm.1", "ncm.1 : min. ncm width : 0.38um") -ncm.isolated(0.38, euclidian).output("ncm.2", "ncm.2 : min. ncm spacing manual merge if smaller : 0.38um") -ncm.enclosing(diff.and(nwell), 0.18, euclidian).output("ncm.3", "ncm.3 : min. ncm enclosure of p+diff : 0.18um") -ncm.separation(lvtn.and(diff), 0.23, euclidian).output("ncm.5", "ncm.5 : min. ncm spacing lvtn diff : 0.23um") -ncm.separation(diff.not(nwell), 0.2, euclidian).output("ncm.6", "ncm.6 : min. ncm spacing nfet : 0.2um") -ncm.with_area(0..0.265).output("ncm.7", "ncm.13 : min. ncm area : 0.265um²") - -# diff-tap -difftap = diff + tap -difftap.width(0.15, euclidian).output("difftap.1", "difftap.1 : min. difftap width : 0.15um") -not_in_cell1 = layout(source.cell_obj).select("s8cell_ee_plus_sseln_a", "-s8cell_ee_plus_sseln_b", "-s8cell_ee_plus_sselp_a", "-s8cell_ee_plus_sselp_b" , "-s8fpls_pl8", "-s8fpls_rdrv4" , "-s8fpls_rdrv4f", "-s8fpls_rdrv8") -not_in_cell1_diff = not_in_cell1.input(65, 20) -not_in_cell1_diff.not(areaid_sc).not(poly).edges.and(gate.edges).with_length(0,0.42).output("difftap.2", "difftap.2: min. gate (exempt areaid.sc) width : 0.42um") -diff.and(areaid_sc).not(poly).edges.and(gate.edges).with_length(0,0.36).output("difftap.2", "difftap.2: min. gate inside areaid.sc width : 0.36um") -difftap.isolated(0.27, euclidian).output("difftap.3", "difftap.3 : min. difftap spacing : 0.27um") -tap.edges.and(diff.edges).with_length(0,0.29).output("difftap.4", "difftap.4 : min. tap bound by diffusion : 0.29um") -tap.edges.and(diff.edges).space(0.4, projection).output("difftap.5", "difftap.5 : min. tap bound by 2 diffusions : 0.4um") -(tap.edges.and(diff.edges)).extended(0.01, 0.01, 0, 0, false).not(tap.and(diff)).and(diff.or(tap)).output("difftap.6", "difftap.6 : diff and tap not allowed to extend beyong their abutting ege") -tap.edges.not_interacting(diff.edges).separation(diff.edges, 0.13, euclidian).output("difftap.7", "difftap.7 : min. diff/tap spacing to non-coincident diff edge : 0.13um") -diff.edges.not_interacting(tap.edges).separation(tap.edges, 0.13, euclidian).output("difftap.7", "difftap.7 : min. diff/tap spacing to non-coincident tap edge : 0.13um") -nwell.enclosing(diff.not(uhvi).and(psdm), 0.18, euclidian).output("difftap.8", "difftap.8 : min. p+diff enclosure by nwell : 0.18um") -diff.not(uhvi).and(nsdm).separation(nwell, 0.34, euclidian).output("difftap.9", "difftap.9 : min. n+diff spacing to nwell : 0.34um") -nwell.enclosing(tap.not(uhvi).and(nsdm), 0.18, euclidian).output("difftap.10", "difftap.10 : min. n+tap enclosure by nwell : 0.18um") -tap.not(uhvi).and(psdm).separation(nwell, 0.13, euclidian).output("difftap.11", "difftap.11 : min. p+tap spacing to nwell : 0.13um") - -# tunm -tunm.width(0.41, euclidian).output("tunm.1", "tunm.1 : min. tunm width : 0.41um") -tunm.isolated(0.5, euclidian).output("tunm.2", "tunm.2 : min. tunm spacing : 0.5um") -tunm.enclosing(gate, 0.095, euclidian).output("tunm.3", "tunm.3 : min. tunm beyond gate : 0.095um") -tunm.separation(gate.not_interacting(tunm), 0.095, euclidian).output("tunm.4", "tunm.4 : min. tunm spacing to gate outside tunm: 0.095um") -gate.and(tunm).edges.not(gate.edges).output("tunm.5", "tunm.5 : gate must not straddle tunm") -tunm.not(dnwell).output("tunm.6a", "tunm.6a : tunm not allowed outside dnwell") -tunm.with_area(0..0.672).output("tunm.7", "tunm.7 : min. tunm area : 0.672um²") - -# poly -poly.width(0.15, euclidian).output("poly.1a", "poly.1a : min. poly width : 0.15um") -poly.not(diff).edges.and(gate.and(lvtn).edges).space(0.35, euclidian).output("poly.1b", "poly.1b: min. lvtn gate width : 0.35um") -poly.isolated(0.21, euclidian).output("poly.2", "poly.2 : min. poly spacing : 0.21um") -poly.and(rpm.or(urpm).or(poly_rs)).width(0.33, euclidian).output("poly.3", "poly.3 : min. poly resistor width : 0.33um") -poly.not(gate).separation(diff, 0.075, projection).polygons.without_area(0).output("poly.4", "poly.4 : min. poly on field spacing to diff : 0.075um") -poly.not(gate).separation(tap, 0.055, euclidian).output("poly.5", "poly.5 : min. poly on field spacing to tap : 0.055um") -gate.separation(tap, 0.3, projection).polygons.and(diff).output("poly.6", "poly.6 : min. gate spacing to tap : 0.3um") -diff.enclosing(gate, 0.25, projection).polygons.without_area(0).output("poly.7", "poly.7 : min. source/drain length : 0.25um") -poly.enclosing(gate, 0.13, projection).polygons.without_area(0).output("poly.8", "poly.8 : min. poly extention gate (endcap) : 0.13um") -poly.and(rpm.or(urpm).or(poly_rs)).separation(poly.or(difftap), 0.48, euclidian).polygons.without_area(0).output("poly.9", "poly.9 : min. poly resistor space to poly or diff/tap : 0.48um") -diff.merged.edges.end_segments(0.01).and(poly).output("poly.10", "poly.10 : poly must not overlap diff corner") -gate.with_angle(0 .. 90).output("poly.11", "poly.11 : non 90 degree angle gate") -not_in_cell3 = layout(source.cell_obj).select("s8fgvr_n_fg2") -not_in_cell3_poly = not_in_cell3.input(66, 20) -not_in_cell3_poly.not(hvi).not(nwell.not(hvi)).and(tap).output("poly.12", "poly.12 : poly must not overlap tap") -poly.and(diff_rs).output("poly.15", "poly.15 : poly must not overlap diff resistor") - -# rpm -rpm.width(1.27, euclidian).output("rpm.1a", "rpm.1a : min. rpm width : 1.27um") -rpm.isolated(0.84, euclidian).output("rpm.2", "rpm.2 : min. rpm spacing : 0.84um") -rpm.enclosing(poly.and(poly_rs).and(psdm), 0.2, euclidian).output("rpm.3", "rpm.3 : min. rpm enclosure of poly resistor : 0.2um") -psdm.enclosing(poly.and(poly_rs).and(rpm), 0.11, euclidian).output("rpm.4", "rpm.4 : min. psdm enclosure of poly resistor : 0.11um") -npc.enclosing(poly.and(poly_rs).and(rpm), 0.095, euclidian).output("rpm.5", "rpm.5 : min. npc enclosure of poly resistor : 0.095um") -rpm.separation(nsdm, 0.2, euclidian).output("rpm.6", "rpm.6 : min. rpm spacing nsdm: 0.2um") -rpm.separation(poly, 0.2, euclidian).output("rpm.7", "rpm.7 : min. rpm spacing poly: 0.2um") -rpm.and(poly).edges.not(poly.edges).output("rpm.8", "rpm.8 : poly must not straddle rpm") -poly.and(poly_rs).and(rpm).separation(hvntm, 0.185, euclidian).output("rpm.9", "rpm.9 : min. poly resistor spacing hvntm: 0.185um") -rpm.and(pwbm).output("rpm.10", "rpm.107 : min. rpm spacing pwbm: na") - -# varac -varac = poly & tap & (nwell - hvi) - areaid_ce -tap.not(poly).edges.and(varac.edges).space(0.18, euclidian).output("varac.1", "varac.1: min. varac channel length : 0.18um") -tap.and(poly).edges.and(varac.edges).space(1.0, euclidian).output("varac.2", "varac.2: min. varac channel wdth : 1.0um") -varac.separation(hvtp, 0.18, euclidian).output("varac.3", "varac.3: min. varac channel space to hvtp : 0.18um") -varac.separation(licon.and(tap), 0.25, euclidian).output("varac.4", "varac.4: min. varac channel space to licon on tap : 0.25um") -nwell.enclosing(poly.overlapping(varac), 0.15, euclidian).output("varac.5", "varac.5: min. nwell enclosure of poly overlapping varac channel : 0.15um") -tap.overlapping(varac).separation(difftap, 0.27, euclidian).polygons.without_area(0).output("varac.6", "varac.6: min. varac channel tap space to difftap : 0.27um") -nwell.overlapping(varac).and(diff.and(nwell)).output("varac.7", "varac.7: nwell overlapping varac channel must not overlap p+diff") - -# photo -photodiode = dnwell & areaid_po -photodiode.edges.without_length(3.0).output("photo.2", "photo.2 : minimum/maximum width of photodiode : 3.0um") -photodiode.isolated(5.0, euclidian).output("photo.3", "photo.3 : mini. photodiode spacing : 5.0um") -photodiode.separation(dnwell, 5.3, euclidian).output("photo.4", "photo.4 : mini. photodiode spacing to dnwell : 5.3um") -areaid_po.not(dnwell).output("photo.5.6", "photo.5.6 : photodiode edges must coincide areaid.po and enclosed by dnwell") -photodiode.not(tap.not(nwell).holes).output("photo.7", "photo.7 : photodiode must be enclosed by p+tap ring") -photodiode.and(nwell).edges.without_length(0.84).output("photo.8", "photo.8 : minimum/maximum width of nwell inside photodiode : 0.84um") -areaid_po.edges.and(photodiode.and(nwell).sized(1.08)).without_length(12.0).output("photo.9", "photo.9 : minimum/maximum enclosure of nwell by photodiode : 1.08um") -photodiode.and(tap).edges.without_length(0.41).output("photo.10", "photo.10 : minimum/maximum width of tap inside photodiode : 0.41um") - -# npc -npc.width(0.27, euclidian).output("npc.1", "npc.1 : min. npc width : 0.27um") -npc.isolated(0.27, euclidian).output("npc.2", "npc.2 : min. npc spacing, should be mnually merge if less : 0.27um") -npc.separation(gate, 0.09, euclidian).output("npc.4", "npc.4 : min. npc spacing to gate : 0.09um") - -# nsdm/psdm -npsdm = nsdm + psdm -nsdm.width(0.38, euclidian).output("nsdm.1", "nsdm.1 : min. nsdm width : 0.38um") -psdm.width(0.38, euclidian).output("psdm.1", "psdm.1 : min. psdm width : 0.38um") -nsdm.isolated(0.38, euclidian).output("n/psdm.1", "n/psdm.1 : min. nsdm spacing, should be mnually merge if less : 0.38um") -psdm.isolated(0.38, euclidian).output("n/psdm.1", "n/psdm.1 : min. psdm spacing, should be mnually merge if less : 0.38um") -npsdm.enclosing(diff, 0.125, euclidian).polygons.not(tap.sized(0.125)).output("n/psdm.5a", "n/psdm.5a : min. n/psdm enclosure diff except butting edge : 0.125um") -npsdm.enclosing(tap, 0.125, euclidian).polygons.not(diff.sized(0.125)).output("n/psdm.5b", "n/psdm.5b : min. n/psdm enclosure tap except butting edge : 0.125um") -tap.edges.and(diff.edges).not(npsdm).output("n/psdm.6", "n/psdm.6 : min. n/psdm enclosure of butting edge : 0.0um") -nsdm.and(difftap).separation(psdm.and(difftap), 0.13, euclidian).polygons.without_area(0).output("n/psdm.7", "n/psdm.7 : min. nsdm diff spacing to psdm diff except butting edge : 0.13um") -diff.and((nsdm.and(nwell)).or(psdm.not(nwell))).output("n/psdm.8", "n/psdm.8 : diff should be the opposite type of well/substrate underneath") -tap.and((nsdm.not(nwell)).or(psdm.and(nwell))).output("n/psdm.8", "n/psdm.8 : tap should be the same type of well/substrate underneath") -tap.and(diff).without_area(0).output("tap and diff", "tap and diff must not overlap") -nsdm.with_area(0..0.265).output("n/psdm.10a", "n/psdm.10a : min. nsdm area : 0.265um²") -psdm.with_area(0..0.265).output("n/psdm.10b", "n/psdm.10b : min. psdm area : 0.265um²") - -# licon -licon.not(poly.interacting(poly_rs).and(rpm)).edges.without_length(0.17).output("licon.1", "licon.1 : minimum/maximum width of licon : 0.17um") -licon.and(poly.interacting(poly_rs).and(rpm)).not_interacting((licon.and(poly.interacting(poly_rs).and(rpm)).edges.with_length(0.19)).or(licon.and(poly.interacting(poly_rs).and(rpm)).edges.with_length(2.0))).output("licon.1b/c", "licon.1b/c : minimum/maximum width/length of licon inside poly resistor : 2.0/0.19um") -licon.isolated(0.17, euclidian).output("licon.2", "licon.2 : min. licon spacing : 0.17um") -licon.and(poly.interacting(poly_rs).and(rpm)).edges.with_length(0.19).space(0.35, euclidian).output("licon.2b", "licon.2b : min. licon 0.19um edge on resistor spacing : 0.35um") -licon.interacting(licon.and(poly.interacting(poly_rs).and(rpm)).edges.with_length(2.0)).separation(licon.and(poly.interacting(poly_rs).and(rpm)), 0.51, euclidian).output("licon.2c", "licon.2c : min. licon 2.0um edge on resistor spacing : 0.51um") -licon.and(poly.interacting(poly_rs).and(rpm)).separation(licon.not(poly.interacting(poly_rs).and(rpm)), 0.51, euclidian).output("licon.2d", "licon.2d : min. licon on resistor spacing other licon : 0.51um") -# rule licon.3 not coded -licon.not(li).not(poly.or(diff).or(tap)).output("licon.4", "licon.4 : min. licon must overlap li and (poly or tap or diff) ") -diff.enclosing(licon, 0.04, euclidian).output("licon.5", "licon.5 : min. diff enclosure of licon : 0.04um") -tap.edges.and(diff.edges).separation(licon.and(tap).edges, 0.06, euclidian).output("licon.6", "licon.6 : min. abutting edge spacing to licon tap : 0.06um") -licon_edges_with_less_enclosure_tap = tap.enclosing(licon, 0.12, projection).second_edges -opposite1 = (licon.edges - licon_edges_with_less_enclosure_tap).width(0.17 + 1.dbu, projection).polygons -licon.not_interacting(opposite1).output("licon.7", "licon.7 : min. tap enclosure of licon by one of 2 opposite edges : 0.12um") -poly.enclosing(licon, 0.05, euclidian).output("licon.8", "licon.8 : min. poly enclosure of licon : 0.05um") -licon008 = licon.interacting(poly.enclosing(licon, 0.08, euclidian).polygons) -licon_edges_with_less_enclosure_poly = poly.enclosing(licon, 0.08, projection).second_edges -opposite2 = (licon.edges - licon_edges_with_less_enclosure_poly).width(0.17 + 1.dbu, projection).polygons -licon008.not_interacting(opposite2).output("licon.8a", "licon.8a : min. poly enclosure of licon by one of 2 opposite edges : 0.08um") -# rule licon.9 not coded -licon.and(tap.and(nwell.not(hvi))).separation(varac, 0.25, euclidian).output("licon.10", "licon.10 : min. licon spacing to varac channel : 0.25um") -not_in_cell4 = layout(source.cell_obj).select("-s8fs_gwdlvx4", "-s8fs_gwdlvx8", "-s8fs_hvrsw_x4", "-s8fs_hvrsw8", "-s8fs_hvrsw264", "-s8fs_hvrsw520", "-s8fs_rdecdrv", "-s8fs_rdec8”, “s8fs_rdec32", "-s8fs_rdec264", "-s8fs_rdec520") -not_in_cell4_licon = not_in_cell4.input(66, 44) -not_in_cell4_licon.and(diff.or(tap)).separation(gate.not(areaid_sc), 0.055, euclidian).output("licon.11", "licon.11 : min. licon spacing to gate : 0.055um") -licon.and(diff.or(tap)).separation(gate.and(areaid_sc), 0.05, euclidian).output("licon.11a", "licon.11a : min. licon spacing to gate inside areaid.sc : 0.05um") -in_cell4 = layout(source.cell_obj).select("+s8fs_gwdlvx4", "+s8fs_gwdlvx8", "+s8fs_hvrsw_x4", "+s8fs_hvrsw8", "+s8fs_hvrsw264", "+s8fs_hvrsw520") -in_cell4_licon = in_cell4.input(66, 44) -in_cell4_licon.and(diff.or(tap)).separation(gate, 0.04, euclidian).output("licon.11c", "licon.11c : min. licon spacing to gate for specific cells: 0.04um") -# rules 11.b , 11.d not coded -diff.interacting(gate).not(diff.interacting(gate).width(5.7, euclidian).polygons).output("licon.12", "licon.12 : max. sd width without licon : 5.7um") -licon.and(diff.or(tap)).separation(npc, 0.09, euclidian).output("licon.13", "licon.13 : min. difftap licon spacing to npc : 0.09um") -licon.and(poly).separation(diff.or(tap), 0.19, euclidian).output("licon.14", "licon.14 : min. poly licon spacing to difftap : 0.19um") -npc.enclosing(licon.and(poly), 0.1, euclidian).output("licon.15", "licon.15 : min. npc enclosure of poly-licon : 0.1um") -# rule licon.16 not applicable for the diff for the nmos of a nand gates or the pmos of a nor gates -#diff.not(gate).not_interacting(licon).output("licon.16", "licon.16 : diff must enclose one licon") -tap.not(uhvi).not_interacting(licon).output("licon.16", "licon.16 : tap must enclose one licon") -poly.and(tap).edges.not(tap.edges).output("licon.17", "licon.17 : tap must not straddle poly") -npc.not_interacting(licon.and(poly)).output("licon.18", "licon.18 : npc mut enclosed one poly-licon") - -# vpp -vpp.width(1.43, euclidian).output("vpp.1", "vpp.1 : min. vpp width : 1.43um") -# rules 1.b, 1.c not coded -vpp.and(poly.or(difftap)).output("vpp.3", "vpp.3 : vpp must not overlapp poly or diff or tap") -vpp.and(nwell).edges.not(vpp.edges).output("vpp.4", "vpp.4 : vpp must not straddle nwell") -vpp.and(dnwell).edges.not(vpp.edges).output("vpp.4", "vpp.4 : vpp must not straddle dnwell") -vpp.and(poly.or(li).or(m1).or(m2)).separation(poly.or(li).or(m1).or(m2), 1.5, euclidian).polygons.with_area(2.25,nil).output("vpp.5", "vpp.5 : min. vpp spacing to poly or li or m1 or m2 : 1.5um") -vpp.with_area(0..area(vpp.and(m3))*0.25).output("vpp.5a", "vpp.5a : max. m3 density in vpp : 0.25") -vpp.with_area(0..area(vpp.and(m4))*0.3).output("vpp.5b", "vpp.5b : max. m4 density in vpp : 0.3") -vpp.with_area(0..area(vpp.and(m5))*0.4).output("vpp.5c", "vpp.5c : max. m5 density in vpp : 0.4") -nwell.enclosing(vpp, 1.5, euclidian).output("vpp.8", "vpp.8 : nwell enclosure of vpp : 1.5") -vpp.separation(nwell, 1.5, euclidian).polygons.without_area(0).output("vpp.9", "vpp.9 : vpp spacing to nwell : 1.5") -# rule vpp.10 not coded -# rule vpp.11 not coded because moscap is not defined properly by any gds layer -# rules vpp.12a, 12b, 12c not coded because specific to one cell -if backend_flow = CU - m1.separation(vpp.and(m1), 0.16, euclidian).polygons.without_area(0).output("vpp.13", "vpp.13 : m1 spacing to m1inside vpp : 0.16") -end - -# CAPM -capm.width(1.0, euclidian).output("capm.1", "capm.1 : min. capm width : 1.0um") -capm.isolated(0.84, euclidian).output("capm.2a", "capm.2a : min. capm spacing : 0.84um") -m2.interacting(capm).isolated(1.2, euclidian).output("capm.2b", "capm.2b : min. capm spacing : 1.2um") -m2.enclosing(capm, 0.14, euclidian).output("capm.3", "capm.3 : min. m2 enclosure of capm : 0.14um") -capm.enclosing(via2, 0.14, euclidian).output("capm.4", "capm.4 : min. capm enclosure of via2 : 0.14um") -capm.separation(via2, 0.14, euclidian).output("capm.5", "capm.5 : min. capm spacing to via2 : 0.14um") -capm.sized(-20.0).sized(20.0).output("capm.6", "capm.6 : max. capm lenght/width : 20um") -capm.with_angle(0 .. 90).output("capm.7", "capm.7 : capm not rectangle") -capm.separation(via, 0.14, euclidian).polygons.without_area(0).output("capm.8", "capm.8 : min. capm spacing to via : 0.14um") -capm.and(nwell).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle nwell") -capm.and(diff).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle diff") -capm.and(tap).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle tap") -capm.and(poly).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle poly") -capm.and(li).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle li") -capm.and(m1).edges.not(capm.edges).output("capm.10", "capm.10 : capm must not straddle m1") -capm.separation(m2.not_interacting(capm), 0.14, euclidian).output("capm.11", "capm.11 : min. capm spacing to m2 not overlapping capm : 0.5um") - -end #FEOL - -if BEOL -info("BEOL section") - -# li -not_in_cell5 = source.select("-s8rf2_xcmvpp_hd5_*") -not_in_cell5_li = not_in_cell5.polygons(li_wildcard) -not_in_cell5_li.width(0.17, euclidian).output("li.1", "li.1 : min. li width : 0.17um") - -in_cell5_li = li - not_in_cell5_li -in_cell5_li.width(0.14, euclidian).output("li.1a", "li.1a : min. li width for the cells s8rf2_xcmvpp_hd5_* : 0.14um") - -# rule li.2 not coded - -not_in_cell5_li.space(0.17, euclidian).output("li.3", "li.3 : min. li spacing : 0.17um") -in_cell5_li.space(0.14, euclidian).output("li.3a", "li.3a : min. li spacing for the cells s8rf2_xcmvpp_hd5_* : 0.14um") -licon08 = licon.interacting(li.enclosing(licon, 0.08, euclidian).polygons) -licon_edges_with_less_enclosure_li = li.enclosing(licon, 0.08, projection).second_edges -opposite3 = (licon.edges - licon_edges_with_less_enclosure_li).width(0.17 + 1.dbu, projection).polygons -licon08.not_interacting(opposite3).output("li.5", "li.5 : min. li enclosure of licon of 2 opposite edges : 0.08um") -li.with_area(0..0.0561).output("li.6", "li.6 : min. li area : 0.0561um²") - -# ct -mcon.edges.without_length(0.17).output("ct.1", "ct.1 : minimum/maximum width of mcon : 0.17um") -mcon.space(0.19, euclidian).output("ct.2", "ct.2 : min. mcon spacing : 0.19um") -# rule ct.3 not coded -mcon.not(li).output("ct.4", "ct.4 : mcon should covered by li") -if backend_flow = CU - li.interacting(li.and(m1).not(mcon).with_holes(1,10)).enclosing(mcon, 0.2, euclidian).output("ct.irdrop.1", "ct.irdrop.1 : min. li enclsoure of 1..10 mcon : 0.2um") - li.interacting(li.and(m1).not(mcon).with_holes(11,100)).enclosing(mcon, 0.3, euclidian).output("ct.irdrop.2", "ct.irdrop.2 : min. li enclsoure of 11..100 mcon : 0.3um") -end - -# m1 -m1.width(0.14, euclidian).output("m1.1", "m1.1 : min. m1 width : 0.14um") - -huge_m1 = m1.sized(-1.5).sized(1.5) -non_huge_m1 = m1 - huge_m1 - -non_huge_m1.space(0.14, euclidian).output("m1.2", "m1.2 : min. m1 spacing : 0.14um") - -(huge_m1.separation(non_huge_m1, 0.28, euclidian) + huge_m1.space(0.28, euclidian)).output("m1.3ab", "m1.3ab : min. 3um.m1 spacing m1 : 0.28um") - -not_in_cell6 = layout(source.cell_obj).select("-s8cell_ee_plus_sseln_a", "-s8cell_ee_plus_sseln_b", "-s8cell_ee_plus_sselp_a", "-s8cell_ee_plus_sselp_b", "-s8fpls_pl8", "-s8fs_cmux4_fm") -not_in_cell6_m1 = not_in_cell6.input(m1_wildcard) -not_in_cell6_m1.enclosing(mcon, 0.03, euclidian).output("m1.4", "m1.4 : min. m1 enclosure of mcon : 0.03um") -in_cell6 = layout(source.cell_obj).select("+s8cell_ee_plus_sseln_a", "+s8cell_ee_plus_sseln_b", "+s8cell_ee_plus_sselp_a", "+s8cell_ee_plus_sselp_b", "+s8fpls_pl8", "+s8fs_cmux4_fm") -in_cell6_m1 = in_cell6.input(m1_wildcard) -in_cell6_m1.enclosing(mcon, 0.005, euclidian).output("m1.4a", "m1.4a : min. m1 enclosure of mcon for specific cells : 0.005um") -m1.with_area(0..0.083).output("m1.6", "m1.6 : min. m1 area : 0.083um²") -m1.holes.with_area(0..0.14).output("m1.7", "m1.7 : min. m1 holes area : 0.14um²") -if backend_flow = AL - mcon06 = mcon.interacting(poly.enclosing(m1, 0.06, euclidian).polygons) - mcon_edges_with_less_enclosure_m1 = m1.enclosing(mcon, 0.06, projection).second_edges - opposite4 = (mcon.edges - mcon_edges_with_less_enclosure_m1).width(0.17 + 1.dbu, projection).polygons - mcon06.not_interacting(opposite4).output("m1.5", "m1.5 : min. m1 enclosure of mcon of 2 opposite edges : 0.06um") - # rule m1.pd.1, rule m1.pd.2a, rule m1.pd.2b not coded -end -if bakend_flow = CU - m1.sized(-2.0).sized(2.0).output("m1.11", "m1.11 : max. m1 width after slotting : 4.0um") - # rule m1.12 not coded because inconsistent with m1.11 - # rule m1.13, m1.14, m1.14a not coded : see : https://www.klayout.de/forum/discussion/comment/6759 -end - -# via -#rule via.3 not coded -via.not(m1).output("via.4c.5c", "via.4c.5c : m1 must enclose all via") -if backend_flow = AL - via.not(areaid_mt).edges.without_length(0.15).output("via.1a", "via.1a : minimum/maximum width of via : 0.15um") - via.and(areaid_mt).not_interacting((via.and(areaid_mt).edges.without_length(0.15)).or(via.and(areaid_mt).edges.without_length(0.23)).or(via.and(areaid_mt).edges.without_length(0.28))).output("via.1b", "via.1b : minimum/maximum width of via in areaid.mt: 0.15um or 0.23um or 0.28um") - via.isolated(0.17, euclidian).output("via.2", "via.2 : min. via spacing : 0.17um") - m1.enclosing(via.not_interacting(via.edges.without_length(0.15)), 0.055, euclidian).output("via.4a", "via.4a : min. m1 enclosure of 0.15um via : 0.055um") - m1.enclosing(via.not_interacting(via.edges.without_length(0.23)), 0.03, euclidian).output("via.4b", "via.4b : min. m1 enclosure of 0.23um via : 0.03um") - via1_edges_with_less_enclosure_m1 = m1.enclosing(via.not_interacting(via.edges.without_length(0.15)), 0.085, projection).second_edges - opposite5 = (via.not_interacting(via.edges.without_length(0.15)).edges - via1_edges_with_less_enclosure_m1).width(0.15 + 1.dbu, projection).polygons - via.not_interacting(via.edges.without_length(0.15)).not_interacting(opposite5).output("via1.5a", "via1.5a : min. m1 enclosure of 0.15um via of 2 opposite edges : 0.085um") - via2_edges_with_less_enclosure_m1 = m1.enclosing(via.not_interacting(via.edges.without_length(0.23)), 0.06, projection).second_edges - opposite6 = (via.not_interacting(via.edges.without_length(0.23)).edges - via2_edges_with_less_enclosure_m1).width(0.23 + 1.dbu, projection).polygons - via.not_interacting(via.edges.without_length(0.23)).not_interacting(opposite6).output("via1.5b", "via1.5b : min. m1 enclosure of 0.23um via of 2 opposite edges : 0.06um") -end -if backend_flow = CU - via.not(areaid_mt).edges.without_length(0.18).output("via.11", "via.11 : minimum/maximum width of via : 0.18um") - via.isolated(0.13, euclidian).output("via.12", "via.12 : min. via spacing : 0.13um") - # rule via.13 not coded because not understandable - via1_edges_with_less_enclosure_m1 = m1.enclosing(via, 0.04, projection).second_edges - opposite5 = (via.edges - via1_edges_with_less_enclosure_m1).width(0.18 + 1.dbu, projection).polygons - via.not_interacting(opposite5).output("via1.14", "via1.14 : min. m1 enclosure of 0.04um via of 2 opposite edges : 0.04um") - # rules via.irdrop.1, via.irdrop.2, via.irdrop.3, via.irdrop.4 not coded because not understandable -end - -# m2 -m2.width(0.14, euclidian).output("m2.1", "m2.1 : min. m2 width : 0.14um") - -huge_m2 = m2.sized(-1.5).sized(1.5) -non_huge_m2 = m2 - huge_m2 - -non_huge_m2.space(0.14, euclidian).output("m2.2", "m2.2 : min. m2 spacing : 0.14um") - -(huge_m2.separation(non_huge_m2, 0.28, euclidian) + huge_m2.space(0.28, euclidian)).output("m2.3ab", "m2.3ab : min. 3um.m2 spacing m2 : 0.28um") - -# rule m2.3c not coded -m2.with_area(0..0.0676).output("m2.6", "m2.6 : min. m2 area : 0.0676um²") -m2.holes.with_area(0..0.14).output("m2.7", "m2.7 : min. m2 holes area : 0.14um²") -via.not(m2).output("m2.via", "m2.via : m2 must enclose via") -if backend_flow = AL - m2.enclosing(via, 0.055, euclidian).output("m2.4", "m2.4 : min. m2 enclosure of via : 0.055um") - via_edges_with_less_enclosure_m2 = m2.enclosing(via, 0.085, projection).second_edges - opposite7 = (via.edges - via_edges_with_less_enclosure_m2).width(0.2 + 1.dbu, projection).polygons - via.not_interacting(opposite7).output("m2.5", "m2.5 : min. m2 enclosure of via of 2 opposite edges : 0.085um") - # rule m2.pd.1, rule m2.pd.2a, rule m2.pd.2b not coded -end -if bakend_flow = CU - m2.sized(-2.0).sized(2.0).output("m2.11", "m2.11 : max. m2 width after slotting : 4.0um") - # rule m2.12 not coded because inconsistent with m2.11 - # rule m2.13, m2.14, m2.14a not coded : see : https://www.klayout.de/forum/discussion/comment/6759 -end - -# via2 -#rule via233 not coded -via2.not(m2).output("via2", "via2 : m2 must enclose all via2") -if backend_flow = AL - via2.not(areaid_mt).edges.without_length(0.2).output("via2.1a", "via2.1a : minimum/maximum width of via2 : 0.2um") - via2.and(areaid_mt).not_interacting((via2.and(areaid_mt).edges.without_length(0.2)).or(via2.and(areaid_mt).edges.without_length(1.2)).or(via2.and(areaid_mt).edges.without_length(1.5))).output("via2.1b", "via2.1b : minimum/maximum width of via2 in areaid.mt: 0.2um or 1.2um or 1.5um") - via2.isolated(0.2, euclidian).output("via2.2", "via2.2 : min. via2 spacing : 0.2um") - m2.enclosing(via2, 0.04, euclidian).output("via2.4", "via2.4 : min. m2 enclosure of via2 : 0.04um") - m2.enclosing(via2.not_interacting(via2.edges.without_length(1.5)), 0.14, euclidian).output("via2.4a", "via2.4a : min. m2 enclosure of 1.5um via2 : 0.14um") - via2_edges_with_less_enclosure_m2 = m2.enclosing(via2, 0.085, projection).second_edges - opposite8 = (via2.edges - via2_edges_with_less_enclosure_m2).width(0.2 + 1.dbu, projection).polygons - via2.not_interacting(opposite8).output("via2.5", "via2.5 : min. m2 enclosure of via2 of 2 opposite edges : 0.085um") -end -if backend_flow = CU - via2.edges.without_length(0.21).output("via2.11", "via2.11 : minimum/maximum width of via2 : 0.21um") - via2.isolated(0.18, euclidian).output("via2.12", "via2.12 : min. via2 spacing : 0.18um") - # rule via2.13 not coded because not understandable, or not clear - m2.enclosing(via2, 0.035, euclidian).output("via2.14", "via2.14 : min. m2 enclosure of via2 : 0.035um") - # rules via2.irdrop.1, via2.irdrop.2, via2.irdrop.3, via2.irdrop.4 not coded because not understandable -end - -# m3 -m3.width(0.3, euclidian).output("m3.1", "m3.1 : min. m3 width : 0.3um") - -huge_m3 = m3.sized(-1.5).sized(1.5) -non_huge_m3 = m3 - huge_m3 - -non_huge_m3.space(0.3, euclidian).output("m3.2", "m3.2 : min. m3 spacing : 0.3um") - -(huge_m3.separation(non_huge_m3, 0.4, euclidian) + huge_m3.space(0.4, euclidian)).output("m3.3ab", "m3.3ab : min. 3um.m3 spacing m3 : 0.4um") - -# rule m3.3c not coded -m3.with_area(0..0.24).output("m3.6", "m3.6 : min. m3 area : 0.24um²") -via2.not(m3).output("m3.via2", "m3.via2 : m3 must enclose via2") -if backend_flow = AL - m3.enclosing(via2, 0.065, euclidian).output("m3.4", "m3.4 : min. m3 enclosure of via2 : 0.065um") - via2_edges_with_less_enclosure_m3 = m3.enclosing(via2, 0.085, projection).second_edges - # m3.5 N/A - # opposite9 = (via2.edges - via2_edges_with_less_enclosure_m3).width(0.3 + 1.dbu, projection).polygons - # via2.not_interacting(opposite9).output("m3.5", "m3.5 : min. m3 enclosure of via2 of 2 opposite edges : 0.085um") - # rule m3.pd.1, rule m3.pd.2a, rule m3.pd.2b not coded -end -if bakend_flow = CU - m3.holes.with_area(0..0.2).output("m3.7", "m3.7 : min. m3 holes area : 0.2um²") - m3.sized(-2.0).sized(2.0).output("m3.11", "m3.11 : max. m3 width after slotting : 4.0um") - # rule m3.12 not coded because inconsistent with m3.11 - # rule m3.13, m3.14, m3.14a not coded : see : https://www.klayout.de/forum/discussion/comment/6759 -end - -# via3 -#rule via3.3 not coded -via3.not(m3).output("via3", "via3 : m3 must enclose all via3") -if backend_flow = AL - via3.not(areaid_mt).edges.without_length(0.2).output("via3.1a", "via3.1a : minimum/maximum width of via3 : 0.2um") - via3.and(areaid_mt).not_interacting((via3.and(areaid_mt).edges.without_length(0.2)).or(via3.and(areaid_mt).edges.without_length(0.8))).output("via3.1a", "via3.1a : minimum/maximum width of via3 in areaid.mt: 0.2um or 0.8um") - via3.isolated(0.2, euclidian).output("via3.2", "via3.2 : min. via3 spacing : 0.2um") - m3.enclosing(via3, 0.06, euclidian).output("via3.4", "via3.4 : min. m3 enclosure of via3 : 0.06um") - via3_edges_with_less_enclosure_m3 = m3.enclosing(via3, 0.09, projection).second_edges - opposite10 = (via3.edges - via3_edges_with_less_enclosure_m3).width(0.2 + 1.dbu, projection).polygons - via3.not_interacting(opposite10).output("via3.5", "via3.5 : min. m2 enclosure of via3 of 2 opposite edges : 0.09um") -end -if backend_flow = CU - via3.edges.without_length(0.21).output("via3.11", "via3.11 : minimum/maximum width of via3 : 0.21um") - via3.isolated(0.18, euclidian).output("via3.12", "via3.12 : min. via3 spacing : 0.18um") - m3.enclosing(via3, 0.055, euclidian).output("via3.13", "via3.13 : min. m3 enclosure of via3 : 0.055um") - # rule via3.14 not coded because not understandable, or not clear - # rules via3.irdrop.1, via3.irdrop.2, via3.irdrop.3, via3.irdrop.4 not coded because not understandable -end - -# m4 -m4.width(0.3, euclidian).output("m4.1", "m4.1 : min. m4 width : 0.3um") - -huge_m4 = m4.sized(-1.5).sized(1.5) -non_huge_m4 = m4 - huge_m4 - -non_huge_m4.space(0.3, euclidian).output("m4.2", "m4.2 : min. m4 spacing : 0.3um") - -(huge_m4.separation(non_huge_m4, 0.4, euclidian) + huge_m4.space(0.4, euclidian)).output("m4.5ab", "m4.5ab : min. 3um.m4 spacing m4 : 0.4um") - -m4.with_area(0..0.24).output("m4.4", "m4.4 : min. m4 area : 0.24um²") -via3.not(m4).output("m4.via3", "m4.via3 : m4 must enclose via3") -if backend_flow = AL - m4.enclosing(via3, 0.065, euclidian).output("m4.3", "m4.3 : min. m4 enclosure of via3 : 0.065um") - # m4.5 doesn't exist - # via3_edges_with_less_enclosure_m4 = m4.enclosing(via2, 0.085, projection).second_edges - # opposite9 = (via3.edges - via3_edges_with_less_enclosure_m4).width(0.3 + 1.dbu, projection).polygons - # via3.not_interacting(opposite9).output("m4.5", "m4.5 : min. m4 enclosure of via3 of 2 opposite edges : 0.085um") - # rule m4.pd.1, rule m4.pd.2a, rule m4.pd.2b not coded -end -if bakend_flow = CU - m4.holes.with_area(0..0.2).output("m4.7", "m4.7 : min. m4 holes area : 0.2um²") - m4.sized(-5.0).sized(5.0).output("m4.11", "m4.11 : max. m4 width after slotting : 10.0um") - # rule m4.12 not coded because inconsistent with m4.11 - # rule m4.13, m4.14, m4.14a not coded : see : https://www.klayout.de/forum/discussion/comment/6759 - m4.enclosing(via3, 0.06, euclidian).output("m4.15", "m4.15 : min. m4 enclosure of via3 : 0.06um") -end - -# via4 -via4.edges.without_length(0.8).output("via4.1a", "via4.1a : minimum/maximum width of via4 : 0.8um") -via4.isolated(0.8, euclidian).output("via4.2", "via4.2 : min. via4 spacing : 0.8um") -#rule via4.3 not coded -m4.enclosing(via4, 0.19, euclidian).output("via4.4", "via4.4 : min. m4 enclosure of via4 : 0.19um") -via4.not(m4).output("via4", "via4 : m4 must enclose all via4") -if backend_flow = CU - # rules via4.irdrop.1, via4.irdrop.2, via4.irdrop.3, via4.irdrop.4 not coded because not understandable -end - -# m5 -m5.width(1.6, euclidian).output("m5.1", "m5.1 : min. m5 width : 1.6um") - -m5.space(1.6, euclidian).output("m5.2", "m5.2 : min. m5 spacing : 1.6um") - -via4.not(m5).output("m5.via4", "m5.via4 : m5 must enclose via4") -m5.enclosing(via4, 0.31, euclidian).output("m5.3", "m4.3 : min. m5 enclosure of via4 : 0.31um") - -# nsm -nsm.width(3.0, euclidian).output("nsm.1", "nsm.1 : min. nsm width : 3.0um") -nsm.isolated(4.0, euclidian).output("nsm.2", "nsm.2 : min. nsm spacing : 4.0um") -nsm.enclosing(diff, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of diff : 3.0um") -nsm.enclosing(tap, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of tap : 3.0um") -nsm.enclosing(poly, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of poly : 3.0um") -nsm.enclosing(li, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of li : 3.0um") -nsm.enclosing(m1, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of m1 : 3.0um") -nsm.enclosing(m2, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of m2 : 3.0um") -nsm.enclosing(m3, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of m3 : 3.0um") -nsm.enclosing(m4, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of m4 : 3.0um") -nsm.enclosing(m5, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of m5 : 3.0um") -nsm.enclosing(cfom, 3.0, euclidian).output("nsm.4", "nsm.4 : min. nsm enclosure of cfom : 3.0um") -if backend_flow = AL - nsm.separation(diff, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to diff : 1.0um") - nsm.separation(tap, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to tap : 1.0um") - nsm.separation(poly, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to poly : 1.0um") - nsm.separation(li, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to li : 1.0um") - nsm.separation(m1, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to m1 : 1.0um") - nsm.separation(m2, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to m2 : 1.0um") - nsm.separation(m3, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to m3 : 1.0um") - nsm.separation(m4, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to m4 : 1.0um") - nsm.separation(m5, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to m5 : 1.0um") - nsm.separation(cfom, 1.0, euclidian).output("nsm.3", "nsm.3 : min. nsm spacing to cfom : 1.0um") -end - -# pad -pad.isolated(1.27, euclidian).output("pad.2", "pad.2 : min. pad spacing : 1.27um") - -end #BEOL - -if FEOL -info("FEOL section") - -# mf -mf.not_interacting(mf.edges.without_length(0.8)).output("mf.1", "mf.1 : minimum/maximum width of fuse : 0.8um") -mf.not_interacting(mf.edges.without_length(7.2)).output("mf.2", "mf.2 : minimum/maximum length of fuse : 7.2um") -mf.isolated(1.96, euclidian).output("mf.3", "mf.3 : min. fuse center spacing : 2.76um") -# fuses need more clarification on fuse_shield, fuse layers ... - -# hvi -hvi.width(0.6, euclidian).output("hvi.1", "hvi.1 : min. hvi width : 0.6um") -hvi.isolated(0.7, euclidian).output("hvi.2", "hvi.2 : min. hvi spacing, merge if less : 0.7um") -hvi.and(tunm).output("hvi.4", "hvi.4 : hvi must not overlapp tunm") -hvi.and(nwell).separation(nwell, 2.0, euclidian).output("hvnwell.8", "hvnwelli.8 : min. hvnwel spacing to nwell : 2.0") -areaid_hl.not(hvi).output("hvnwel.9", "hvnwell.9 : hvi must overlapp hvnwell") -# rule hvnell.10 not coded -diff.not(psdm.and(diff_rs)).and(hvi).width(0.29, euclidian).output("hvdifftap.14", "hvdifftap.14 : min. diff inside hvi width : 0.29um") -diff.and(psdm.and(diff_rs)).and(hvi).width(0.15, euclidian).output("hvdifftap.14a", "hvdifftap.14a : min. p+diff resistor inside hvi width : 0.15um") -diff.and(hvi).isolated(0.3, euclidian).output("hvdifftap.15a", "hvdifftap.15a : min. diff inside hvi spacing : 0.3um") -diff.and(hvi).and(nsdm).separation(diff.and(hvi).and(psdm), 0.37, euclidian).polygons.without_area(0).output("hvdifftap.15b", "hvdifftap.15b : min. n+diff inside hvi spacing to p+diff inside hvi except abutting: 0.37um") -tap.and(hvi).edges.and(diff).without_length(0.7).output("hvdifftap.16", "hvdifftap.16 : min. tap inside hvi abuttng diff : 0.7um") -hvi.and(nwell).enclosing(diff, 0.33, euclidian).output("hvdifftap.17", "hvdifftap.17 : min. hvnwell enclosure of p+diff : 0.33um") -hvi.and(nwell).separation(diff, 0.43, euclidian).output("hvdifftap.18", "hvdifftap.18 : min. hvnwell spacing to n+diff : 0.43um") -hvi.and(nwell).enclosing(tap, 0.33, euclidian).output("hvdifftap.19", "hvdifftap.19 : min. hvnwell enclosure of n+tap : 0.33um") -hvi.and(nwell).separation(tap, 0.43, euclidian).output("hvdifftap.20", "hvdifftap.20 : min. hvnwell spacing to p+tap : 0.43um") -hvi.and(diff).edges.not(diff.edges).output("hvdifftap.21", "hvdifftap.21 : diff must not straddle hvi") -hvi.and(tap).edges.not(tap.edges).output("hvdifftap.21", "hvdifftap.21 : tap must not straddle hvi") -hvi.enclosing(difftap, 0.18, euclidian).output("hvdifftap.22", "hvdifftap.22 : min. hvi enclosure of diff or tap : 0.18um") -hvi.separation(difftap, 0.18, euclidian).output("hvdifftap.23", "hvdifftap.23 : min. hvi spacing to diff or tap : 0.18um") -hvi.and(diff).not(nwell).separation(nwell, 0.43, euclidian).output("hvdifftap.24", "hvdifftap.24 : min. hv n+diff spacing to nwell : 0.43um") -diff.and(hvi).not(nwell).isolated(1.07, euclidian).polygons.and(tap).output("hvdifftap.25", "hvdifftap.25 : min. n+diff inside hvi spacing accros p+tap : 1.07um") -diff.not(poly).edges.and(gate.and(hvi).edges).space(0.35, euclidian).output("hvpoly.13", "hvpoly.13: min. hvi gate length : 0.5um") -hvi.and(poly).edges.not(poly.edges).output("hvpoly.14", "hvpoly.14 : poly must not straddle hvi") - -# hvntm -hvntm.width(0.7, euclidian).output("hvntm.1", "hvntm.1 : min. hvntm width : 0.7um") -hvntm.isolated(0.7, euclidian).output("hvntm.2", "hvntm.2 : min. hvntm spacing : 0.7um") -hvntm.enclosing(diff.and(nwell).and(hvi), 0.185, euclidian).output("hvntm.3", "hvntm.3 : min. hvntm enclosure of hv n+diff : 0.185um") -hvntm.separation(diff.not(nwell).not(hvi), 0.185, euclidian).output("hvntm.4", "hvntm.4 : min. hvntm spacing to n+diff : 0.185um") -hvntm.separation(diff.and(nwell).not(hvi), 0.185, euclidian).output("hvntm.5", "hvntm.5 : min. hvntm spacing to p+diff : 0.185um") -hvntm.separation(tap.not(nwell).not(hvi), 0.185, euclidian).polygons.without_area(0).output("hvntm.6a", "hvntm.6a : min. hvntm spacing to p+tap : 0.185um") -hvntm.and(areaid_ce).output("hvntm.9", "hvntm.9 : hvntm must not overlapp areaid.ce") - -# denmos -poly.not_interacting(pwde).interacting(areaid_en).width(1.055, projection).output("denmos.1", "denmos.1 : min. de_nfet gate width : 1.055um") -diff.not_interacting(pwde).enclosing(poly.interacting(areaid_en), 0.28, projection).polygons.without_area(0).output("denmos.2", "denmos.2 : min. de_nfet source ouside poly width : 0.28um") -diff.not_interacting(pwde).and(poly.interacting(areaid_en)).width(0.925, projection).output("denmos.3", "denmos.3 : min. de_nfet source inside poly width : 0.925um") -diff.not_interacting(pwde).interacting(areaid_en).not_interacting(poly).width(0.17, euclidian).output("denmos.4", "denmos.4 : min. de_nfet drain width : 0.17um") -nwell.not_interacting(pwde).and(poly.interacting(areaid_en)).width(0.225, projection).polygons.or(nwell.and(poly.interacting(areaid_en)).sized(-0.1125).sized(0.1125)).output("denmos.5", "denmos.5 : min. de_nfet source inside nwell width : 0.225m") -diff.not_interacting(pwde).interacting(areaid_en).not_interacting(poly).separation(diff.interacting(poly.interacting(areaid_en)), 1.585, projection).output("denmos.6", "denmos.6 : min. de_nfet source spacing to drain : 1.585um") -nwell.not_interacting(pwde).and(poly.and(diff).interacting(areaid_en)).edges.without_length(5.0, nil).output("denmos.7", "denmos.7 : min. de_nfet channel width : 5.0um") -diff.not_interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.without_angle(45).without_angle(135).without_angle(225).without_angle(315).output("denmos.8", "denmos.8 : 90deg. not allowed for de_nfet drain") -nwell.not_interacting(pwde).interacting(areaid_en).edges.without_angle(45).without_angle(135).without_angle(225).without_angle(315).output("denmos.9a", "denmos.9a : 90deg. not allowed for de_nfet nwell") -nwell.not_interacting(pwde).interacting(areaid_en).edges.with_angle(45).without_length(0.607..0.609).output("denmos.9a", "denmos.9a : 45deg. bevels of de_nfet nwell should be 0.43um from corners") -nwell.not_interacting(pwde).interacting(areaid_en).edges.with_angle(135).without_length(0.607..0.609).output("denmos.9a", "denmos.9a : 45deg. bevels of de_nfet nwell should be 0.43um from corners") -diff.not_interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.with_angle(45).without_length(0.7..0.71).output("denmos.9b", "denmos.9b : 45deg. bevels of de_nfet drain should be 0.05um from corners") -diff.not_interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.with_angle(135).without_length(0.7..0.71).output("denmos.9b", "denmos.9b : 45deg. bevels of de_nfet drain should be 0.05um from corners") -nwell.not_interacting(pwde).enclosing(diff.interacting(areaid_en).not_interacting(poly), 0.66, euclidian).output("denmos.10", "denmos.10 : min. nwell enclosure of de_nfet drain : 0.66um") -nwell.not_interacting(pwde).interacting(areaid_en).separation(tap.not(nwell), 0.86, euclidian).output("denmos.11", "denmos.11 : min. de_nfet nwell spacing to tap : 0.86um") -nwell.not_interacting(pwde).interacting(areaid_en).isolated(2.4, euclidian).output("denmos.12", "denmos.12 : min. de_nfet nwell : 2.4um") -nsdm.not_interacting(pwde).enclosing(diff.interacting(areaid_en).interacting(poly), 0.13, euclidian).output("denmos.13", "denmos.13 : min. nsdm enclosure of de_nfet source : 0.13um") - -# depmos -poly.interacting(pwde).interacting(areaid_en).width(1.05, projection).output("depmos.1", "depmos.1 : min. de_pfet gate width : 1.05um") -diff.interacting(pwde).enclosing(poly.interacting(areaid_en), 0.28, projection).polygons.without_area(0).output("depmos.2", "depmos.2 : min. de_pfet source ouside poly width : 0.28um") -diff.interacting(pwde).and(poly.interacting(areaid_en)).width(0.92, projection).output("depmos.3", "depmos.3 : min. de_pfet source inside poly width : 0.92um") -diff.interacting(pwde).interacting(areaid_en).not_interacting(poly).width(0.17, euclidian).output("depmos.4", "depmos.4 : min. de_pfet drain width : 0.17um") -pwde.not(nwell).and(poly.interacting(areaid_en)).width(0.26, projection).polygons.or(pwde.not(nwell).and(poly.interacting(areaid_en)).sized(-0.13).sized(0.13)).output("depmos.5", "depmos.5 : min. de_pfet source inside nwell width : 0.26m") -diff.interacting(pwde).interacting(areaid_en).not_interacting(poly).separation(diff.interacting(poly.interacting(areaid_en)), 1.19, projection).output("depmos.6", "depmos.6 : min. de_pfet source spacing to drain : 1.19um") -nwell.interacting(pwde).and(poly.and(diff).interacting(areaid_en)).edges.without_length(5.0, nil).output("depmos.7", "depmos.7 : min. de_pfet channel width : 5.0um") -diff.interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.without_angle(45).without_angle(135).without_angle(225).without_angle(315).output("depmos.8", "depmos.8 : 90deg. not allowed for de_pfet drain") -pwde.not(nwell).interacting(areaid_en).edges.without_angle(45).without_angle(135).without_angle(225).without_angle(315).output("depmos.9a", "depmos.9a : 90deg. not allowed for de_pfet pwell") -pwde.not(nwell).interacting(areaid_en).edges.with_angle(45).without_length(0.607..0.609).output("depmos.9a", "depmos.9a : 45deg. bevels of de_pfet pwell should be 0.43um from corners") -pwde.not(nwell).interacting(areaid_en).edges.with_angle(135).without_length(0.607..0.609).output("depmos.9a", "depmos.9a : 45deg. bevels of de_pfet pwell should be 0.43um from corners") -diff.interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.with_angle(45).without_length(0.7..0.71).output("depmos.9b", "depmos.9b : 45deg. bevels of de_pfet drain should be 0.05um from corners") -diff.interacting(pwde).interacting(areaid_en).not_interacting(poly).edges.with_angle(135).without_length(0.7..0.71).output("depmos.9b", "depmos.9b : 45deg. bevels of de_pfet drain should be 0.05um from corners") -nwell.interacting(pwde).separation(diff.interacting(areaid_en).not_interacting(poly), 0.86, euclidian).output("depmos.10", "depmos.10 : min. pwell enclosure of de_pfet drain : 0.86um") -pwde.not(nwell).interacting(areaid_en).separation(tap.and(nwell), 0.66, euclidian).output("depmos.11", "depmos.11 : min. de_pfet pwell spacing to tap : 0.66um") -psdm.interacting(pwde).enclosing(diff.interacting(areaid_en).interacting(poly), 0.13, euclidian).output("depmos.12", "depmos.12 : min. psdm enclosure of de_pfet source : 0.13um") - -# extd -areaid_en.and(difftap).edges.not(difftap.edges).output("extd.1", "extd.1 : difftap must not straddle areaid.en") -difftap.interacting(areaid_en).not(poly).with_area(0).output("extd.2", "extd.2 : poly must not overlapp entirely difftap in areaid.en") -# rules extd.4, extd.5, extd.6, extd.7 not coded because specific to some cells - -# vhvi -# rules vhvi.vhv.1, vhvi.vhv.2, vhvi.vhv.3, vhvi.vhv.4, vhvi.vhv.5, vhvi.vhv.6 not coded -vhvi.width(0.02, euclidian).output("vhvi.1", "vhvi.1 : min. vhvi width : 0.02um") -vhvi.and(areaid_ce).output("vhvi.2", "vhvi.2 : vhvi must not overlap areaid.ce") -vhvi.and(hvi).output("vhvi.3", "vhvi.3 : vhvi must not overlap hvi") -# rules vhvi.4, vhvi.6 not coded -vhvi.and(diff).edges.not(diff.edges).output("vhvi.5", "vhvi.5 : vhvi must not straddle diff") -vhvi.and(tap).edges.not(tap.edges).output("vhvi.5", "vhvi.5 : vhvi must not straddle tap") -vhvi.and(poly).edges.not(poly.edges).output("vhvi.7", "vhvi.7 : vhvi must not straddle poly") - -nwell.and(vhvi).separation(nwell, 2.5, euclidian).output("hv.nwell.1", "hv.nwell.1 : min. vhvi nwell spacing to nwell : 2.5um") -diff.and(vhvi).isolated(0.3, euclidian).output("hv.diff.1", "hv.diff.1 : min. vhvi diff spacing : 0.3um") -nwell.interacting(diff.and(vhvi)).separation(diff.not(nwell), 0.43, euclidian).output("hv.diff.2", "hv.diff.2 : min. vhvi nwell spacing n+diff : 0.43um") -diff.and(vhvi).not(nwell).separation(nwell, 0.55, euclidian).output("hv.diff.3a", "hv.diff.3a : min. vhvi n+diff spacing nwell : 0.55um") -# rule hv.diff.3b not coded -poly.and(vhvi).not(diff).separation(diff, 0.3, euclidian).polygons.without_area(0).output("hv.poly.2", "hv.poly.2 : min. vhvi poly spacing to diff : 0.3um") -poly.and(vhvi).not(diff).separation(nwell, 0.55, euclidian).polygons.without_area(0).output("hv.poly.3", "hv.poly.3 : min. vhvi poly spacing to nwell : 0.55um") -nwell.enclosing(poly.and(vhvi).not(diff), 0.3, euclidian).polygons.without_area(0).output("hv.poly.4", "hv.poly.4 : min. nwell enclosure of vhvi poly : 0.3um") -#poly.and(vhvi).enclosing(diff.interacting(areaid_en), 0.16, projection).polygons.without_area(0).output("hv.poly.6", "hv.poly.6 : min. poly enclosure of hvfet gate : 0.16um") -# rule hv.poly.7 not coded - -# uhvi -uhvi.and(diff).edges.not(diff.edges).output("uhvi.1", "uhvi.1 : diff must not straddle uhvi") -uhvi.and(tap).edges.not(tap.edges).output("uhvi.1", "uhvi.1 : tap must not straddle uhvi") -uhvi.and(poly).edges.not(poly.edges).output("uhvi.2", "uhvi.2 : poly must not straddle uhvi") -pwbm.not(uhvi).output("uhvi.3", "uhvi.3 : uhvi must not enclose pwbm") -uhvi.and(dnwell).edges.not(dnwell.edges).output("uhvi.4", "uhvi.4 : dnwell must not straddle uhvi") -areaid_en20.not(uhvi).output("uhvi.5", "uhvi.5 : uhvi must not enclose areaid.en20") -#dnwell.not(uhvi).output("uhvi.6", "uhvi.6 : uhvi must not enclose dnwell") -natfet.not(uhvi).output("uhvi.7", "uhvi.7 : uhvi must not enclose natfet") - -# pwell_res -pwell_rs.width(2.65).output("pwres.2", "pwres.2 : min. pwell resistor width : 2.65um") -pwell_rs.sized(-2.65).sized(2.65).output("pwres.2", "pwres.2 : max. pwell resistor width : 2.65um") -pwell_rs.interacting(pwell_rs.edges.with_length(2.651,26.499)).output("pwres.3", "pwres.3 : min. pwell resistor length : 26.5um") -pwell_rs.interacting(pwell_rs.edges.with_length(265.0, nil)).output("pwres.4", "pwres.4 : max. pwell resistor length : 265um") -tap.interacting(pwell_rs).separation(nwell, 0.22, euclidian).output("pwres.5", "pwres.5 : min. pwell resistor tap spacing to nwell : 0.22um") -tap.interacting(pwell_rs).and(tap.sized(0.22).and(nwell)).output("pwres.5", "pwres.5 : max. pwell resistor tap spacing to nwell : 0.22um") -tap.interacting(pwell_rs).width(0.53).output("pwres.6", "pwres.6 : min. width of tap inside pwell resistor : 0.53um") -tap.interacting(pwell_rs).sized(-0.265).sized(0.265).output("pwres.6", "pwres.6 : max. width of tap inside pwell resistor : 0.53um") -# rules pwres.7a, pwres.7b not coded -pwell_rs.and(diff).output("pwres.8", "pwres.8 : diff not allowed inside pwell resistor") -pwell_rs.and(poly).output("pwres.8", "pwres.8 : poly not allowed inside pwell resistor") -# rules pwres.9, pwres.10 not coded - -# rf_diode -areaid_re.with_angle(0 .. 90).output("rfdiode.1", "rfdiode.1 : non 90 degree angle areaid.re") -areaid_re.not(nwell).or(nwell.interacting(areaid_re).not(areaid_re)).output("rfdiode.2", "rfdiode.2 : areaid.re must coincide rf nwell diode") -# rule rfdiode.3 not coded - -end #FEOL - -if OFFGRID -info("OFFGRID-ANGLES section") - -dnwell.ongrid(0.005).output("dnwell_OFFGRID", "x.1b : OFFGRID vertex on dnwell") -dnwell.with_angle(0 .. 45).output("dnwell_angle", "x.3a : non 45 degree angle dnwell") -nwell.ongrid(0.005).output("nwell_OFFGRID", "x.1b : OFFGRID vertex on nwell") -nwell.with_angle(0 .. 45).output("nwell_angle", "x.3a : non 45 degree angle nwell") -pwbm.ongrid(0.005).output("pwbm_OFFGRID", "x.1b : OFFGRID vertex on pwbm") -pwbm.with_angle(0 .. 45).output("pwbm_angle", "x.3a : non 45 degree angle pwbm") -pwde.ongrid(0.005).output("pwde_OFFGRID", "x.1b : OFFGRID vertex on pwde") -pwde.with_angle(0 .. 45).output("pwde_angle", "x.3a : non 45 degree angle pwde") -hvtp.ongrid(0.005).output("hvtp_OFFGRID", "x.1b : OFFGRID vertex on hvtp") -hvtp.with_angle(0 .. 45).output("hvtp_angle", "x.3a : non 45 degree angle hvtp") -hvtr.ongrid(0.005).output("hvtr_OFFGRID", "x.1b : OFFGRID vertex on hvtr") -hvtr.with_angle(0 .. 45).output("hvtr_angle", "x.3a : non 45 degree angle hvtr") -lvtn.ongrid(0.005).output("lvtn_OFFGRID", "x.1b : OFFGRID vertex on lvtn") -lvtn.with_angle(0 .. 45).output("lvtn_angle", "x.3a : non 45 degree angle lvtn") -ncm.ongrid(0.005).output("ncm_OFFGRID", "x.1b : OFFGRID vertex on ncm") -ncm.with_angle(0 .. 45).output("ncm_angle", "x.3a : non 45 degree angle ncm") -diff.ongrid(0.005).output("diff_OFFGRID", "x.1b : OFFGRID vertex on diff") -tap.ongrid(0.005).output("tap_OFFGRID", "x.1b : OFFGRID vertex on tap") -diff.not(areaid_en.and(uhvi)).with_angle(0 .. 90).output("diff_angle", "x.2 : non 90 degree angle diff") -diff.and(areaid_en.and(uhvi)).with_angle(0 .. 45).output("diff_angle", "x.2c : non 45 degree angle diff") -tap.not(areaid_en.and(uhvi)).with_angle(0 .. 90).output("tap_angle", "x.2 : non 90 degree angle tap") -tap.and(areaid_en.and(uhvi)).with_angle(0 .. 45).output("tap_angle", "x.2c : non 45 degree angle tap") -tunm.ongrid(0.005).output("tunm_OFFGRID", "x.1b : OFFGRID vertex on tunm") -tunm.with_angle(0 .. 45).output("tunm_angle", "x.3a : non 45 degree angle tunm") -poly.ongrid(0.005).output("poly_OFFGRID", "x.1b : OFFGRID vertex on poly") -poly.with_angle(0 .. 90).output("poly_angle", "x.2 : non 90 degree angle poly") -rpm.ongrid(0.005).output("rpm_OFFGRID", "x.1b : OFFGRID vertex on rpm") -rpm.with_angle(0 .. 45).output("rpm_angle", "x.3a : non 45 degree angle rpm") -npc.ongrid(0.005).output("npc_OFFGRID", "x.1b : OFFGRID vertex on npc") -npc.with_angle(0 .. 45).output("npc_angle", "x.3a : non 45 degree angle npc") -nsdm.ongrid(0.005).output("nsdm_OFFGRID", "x.1b : OFFGRID vertex on nsdm") -nsdm.with_angle(0 .. 45).output("nsdm_angle", "x.3a : non 45 degree angle nsdm") -psdm.ongrid(0.005).output("psdm_OFFGRID", "x.1b : OFFGRID vertex on psdm") -psdm.with_angle(0 .. 45).output("psdm_angle", "x.3a : non 45 degree angle psdm") -licon.ongrid(0.005).output("licon_OFFGRID", "x.1b : OFFGRID vertex on licon") -licon.with_angle(0 .. 90).output("licon_angle", "x.2 : non 90 degree angle licon") -li.ongrid(0.005).output("li_OFFGRID", "x.1b : OFFGRID vertex on li") -li.with_angle(0 .. 45).output("li_angle", "x.3a : non 45 degree angle li") -mcon.ongrid(0.005).output("ct_OFFGRID", "x.1b : OFFGRID vertex on mcon") -mcon.with_angle(0 .. 90).output("ct_angle", "x.2 : non 90 degree angle mcon") -vpp.ongrid(0.005).output("vpp_OFFGRID", "x.1b : OFFGRID vertex on vpp") -vpp.with_angle(0 .. 45).output("vpp_angle", "x.3a : non 45 degree angle vpp") -m1.ongrid(0.005).output("m1_OFFGRID", "x.1b : OFFGRID vertex on m1") -m1.with_angle(0 .. 45).output("m1_angle", "x.3a : non 45 degree angle m1") -via.ongrid(0.005).output("via_OFFGRID", "x.1b : OFFGRID vertex on via") -via.with_angle(0 .. 90).output("via_angle", "x.2 : non 90 degree angle via") -m2.ongrid(0.005).output("m2_OFFGRID", "x.1b : OFFGRID vertex on m2") -m2.with_angle(0 .. 45).output("m2_angle", "x.3a : non 45 degree angle m2") -via2.ongrid(0.005).output("via2_OFFGRID", "x.1b : OFFGRID vertex on via2") -via2.with_angle(0 .. 90).output("via2_angle", "x.2 : non 90 degree angle via2") -m3.ongrid(0.005).output("m3_OFFGRID", "x.1b : OFFGRID vertex on m3") -m3.with_angle(0 .. 45).output("m3_angle", "x.3a : non 45 degree angle m3") -via3.ongrid(0.005).output("via3_OFFGRID", "x.1b : OFFGRID vertex on via3") -via3.with_angle(0 .. 90).output("via3_angle", "x.2 : non 90 degree angle via3") -nsm.ongrid(0.005).output("nsm_OFFGRID", "x.1b : OFFGRID vertex on nsm") -nsm.with_angle(0 .. 45).output("nsm_angle", "x.3a : non 45 degree angle nsm") -m4.ongrid(0.005).output("m4_OFFGRID", "x.1b : OFFGRID vertex on m4") -m4.with_angle(0 .. 45).output("m4_angle", "x.3a : non 45 degree angle m4") -via4.ongrid(0.005).output("via4_OFFGRID", "x.1b : OFFGRID vertex on via4") -via4.with_angle(0 .. 90).output("via4_angle", "x.2 : non 90 degree angle via4") -m5.ongrid(0.005).output("m5_OFFGRID", "x.1b : OFFGRID vertex on m5") -m5.with_angle(0 .. 45).output("m5_angle", "x.3a : non 45 degree angle m5") -pad.ongrid(0.005).output("pad_OFFGRID", "x.1b : OFFGRID vertex on pad") -pad.with_angle(0 .. 45).output("pad_angle", "x.3a : non 45 degree angle pad") -mf.ongrid(0.005).output("mf_OFFGRID", "x.1b : OFFGRID vertex on mf") -mf.with_angle(0 .. 90).output("mf_angle", "x.2 : non 90 degree angle mf") -hvi.ongrid(0.005).output("hvi_OFFGRID", "x.1b : OFFGRID vertex on hvi") -hvi.with_angle(0 .. 45).output("hvi_angle", "x.3a : non 45 degree angle hvi") -hvntm.ongrid(0.005).output("hvntm_OFFGRID", "x.1b : OFFGRID vertex on hvntm") -hvntm.with_angle(0 .. 45).output("hvntm_angle", "x.3a : non 45 degree angle hvntm") -vhvi.ongrid(0.005).output("vhvi_OFFGRID", "x.1b : OFFGRID vertex on vhvi") -vhvi.with_angle(0 .. 45).output("vhvi_angle", "x.3a : non 45 degree angle vhvi") -uhvi.ongrid(0.005).output("uhvi_OFFGRID", "x.1b : OFFGRID vertex on uhvi") -uhvi.with_angle(0 .. 45).output("uhvi_angle", "x.3a : non 45 degree angle uhvi") -pwell_rs.ongrid(0.005).output("pwell_rs_OFFGRID", "x.1b : OFFGRID vertex on pwell_rs") -pwell_rs.with_angle(0 .. 45).output("pwell_rs_angle", "x.3a : non 45 degree angle pwell_rs") -areaid_re.ongrid(0.005).output("areaid_re_OFFGRID", "x.1b : OFFGRID vertex on areaid.re") - -end #OFFGRID - diff --git a/sky130/klayout/sky130.lyp b/sky130/klayout/sky130.lyp index ad00629a..d7a45720 100644 --- a/sky130/klayout/sky130.lyp +++ b/sky130/klayout/sky130.lyp @@ -22,10 +22,10 @@ #00ffff 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -39,10 +39,10 @@ #ffbff2 0 0 - C38 + C37 C0 true - true + false false 1 false @@ -51,6 +51,7 @@ pwell.pin - 122/16 122/16@1 + #9900e6 #9900e6 @@ -59,8 +60,27 @@ C1 C0 true - true - false + false + true + 1 + false + false + 0 + rr1_cell.drawing - 201/20 + 201/20@1 + + + + + #9900e6 + #9900e6 + 0 + 0 + C1 + C0 + true + false + true 1 false false @@ -76,7 +96,7 @@ I1 C0 true - true + false false 1 false @@ -93,7 +113,7 @@ C1 C0 true - true + false false 1 false @@ -107,10 +127,10 @@ #96c8ff 0 0 - C38 + C37 C0 true - true + false false 1 false @@ -127,7 +147,7 @@ C1 C0 true - true + false false 1 false @@ -141,10 +161,10 @@ #00cc66 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -161,7 +181,7 @@ C2 C0 true - true + false false 1 false @@ -175,10 +195,10 @@ #268c6b 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -195,7 +215,7 @@ C1 C0 true - true + false false 1 false @@ -209,10 +229,10 @@ #c8ffc8 0 0 - C47 + C46 C0 true - true + false false 1 false @@ -229,7 +249,7 @@ C6 C0 true - true + false false 1 false @@ -243,10 +263,10 @@ #00ff00 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -263,7 +283,7 @@ I1 C0 true - true + false false 1 false @@ -280,7 +300,7 @@ C1 C0 true - true + false false 1 false @@ -294,10 +314,10 @@ #268c6b 0 0 - C36 + C35 C0 false - true + false false 1 false @@ -314,7 +334,7 @@ C1 C0 false - true + false false 1 false @@ -331,7 +351,7 @@ C5 C0 false - true + false false 1 false @@ -348,7 +368,7 @@ C0 C0 false - true + false false 1 false @@ -362,10 +382,10 @@ #9900e6 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -379,10 +399,10 @@ #d9cc00 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -399,7 +419,7 @@ C6 C0 false - true + false false 1 false @@ -416,7 +436,7 @@ C5 C0 false - true + false false 1 false @@ -433,7 +453,7 @@ C0 C0 false - true + false false 1 false @@ -450,7 +470,7 @@ C1 C0 false - true + false false 1 false @@ -464,10 +484,10 @@ #9900e6 0 0 - C22 + C21 C0 true - true + false false 1 false @@ -481,10 +501,10 @@ #e61f0d 0 0 - C21 + C20 C0 true - true + false false 1 false @@ -498,10 +518,10 @@ #ff0000 0 0 - C41 + C40 C0 true - true + false false 1 false @@ -515,10 +535,10 @@ #ff8000 0 0 - C38 + C37 C0 true - true + false false 1 false @@ -535,7 +555,7 @@ I1 C0 true - true + false false 1 false @@ -552,7 +572,7 @@ C1 C0 true - true + false false 1 false @@ -569,7 +589,7 @@ I1 C0 true - true + false false 1 false @@ -586,7 +606,7 @@ C1 C0 true - true + false false 1 false @@ -603,7 +623,7 @@ C0 C0 true - true + false false 1 false @@ -620,7 +640,7 @@ C1 C0 true - true + false false 1 false @@ -634,10 +654,10 @@ #ff0000 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -654,7 +674,7 @@ C5 C0 true - true + false false 1 false @@ -671,7 +691,7 @@ C1 C0 true - true + false false 1 false @@ -685,10 +705,10 @@ #00cc66 0 0 - C50 + C49 C0 true - true + false false 1 false @@ -705,7 +725,7 @@ C15 C0 true - true + false false 1 false @@ -722,7 +742,7 @@ C14 C0 true - true + false false 1 false @@ -739,7 +759,7 @@ C14 C0 false - true + false false 1 false @@ -753,10 +773,10 @@ #9900e6 0 0 - C41 + C40 C0 true - true + false false 1 false @@ -770,10 +790,10 @@ #ffffcc 0 0 - C23 + C22 C0 true - true + false false 1 false @@ -790,7 +810,7 @@ C0 C0 true - true + false false 1 false @@ -807,7 +827,7 @@ C6 C0 false - true + false false 1 false @@ -824,7 +844,7 @@ C5 C0 true - true + false false 1 false @@ -841,7 +861,7 @@ C0 C0 true - true + false false 1 false @@ -858,7 +878,7 @@ C5 C0 true - true + false false 1 false @@ -872,10 +892,10 @@ #bf4026 0 0 - C46 + C45 C0 true - true + false false 1 false @@ -892,7 +912,7 @@ I1 C0 false - true + false false 1 false @@ -909,7 +929,7 @@ C1 C0 false - true + false false 1 false @@ -926,7 +946,7 @@ C1 C0 true - true + false false 1 false @@ -940,10 +960,10 @@ #ffe6bf 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -960,7 +980,7 @@ C0 C0 true - true + false false 1 false @@ -974,10 +994,10 @@ #bf4026 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -991,10 +1011,10 @@ #ffe6bf 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -1011,7 +1031,7 @@ C1 C0 true - true + false false 1 false @@ -1028,7 +1048,7 @@ C1 C0 true - true + false false 1 false @@ -1045,7 +1065,7 @@ C0 C0 true - true + false false 1 false @@ -1062,7 +1082,7 @@ C6 C0 false - true + false false 1 false @@ -1079,7 +1099,7 @@ C5 C0 true - true + false false 1 false @@ -1096,7 +1116,7 @@ C7 C0 true - true + false false 1 false @@ -1113,7 +1133,7 @@ I1 C0 false - true + false false 1 false @@ -1130,7 +1150,7 @@ C1 C0 false - true + false false 1 false @@ -1147,7 +1167,7 @@ C6 C0 true - true + false false 1 false @@ -1164,8 +1184,8 @@ C1 C0 true - true - false + false + true 1 false false @@ -1181,7 +1201,7 @@ C5 C0 true - true + false false 1 false @@ -1198,7 +1218,7 @@ C0 C0 true - true + false false 1 false @@ -1212,10 +1232,10 @@ #0000ff 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -1229,10 +1249,10 @@ #0000ff 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -1249,7 +1269,7 @@ C1 C0 true - true + false false 1 false @@ -1263,10 +1283,10 @@ #0000ff 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -1280,10 +1300,10 @@ #0000ff 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -1297,10 +1317,10 @@ #0000ff 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -1314,10 +1334,10 @@ #0000ff 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -1331,10 +1351,10 @@ #0000ff 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -1348,10 +1368,10 @@ #0000ff 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -1365,10 +1385,10 @@ #0000ff 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -1382,10 +1402,10 @@ #0000ff 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -1402,7 +1422,7 @@ C1 C0 true - true + false false 1 false @@ -1419,7 +1439,7 @@ C0 C0 true - true + false false 1 false @@ -1436,7 +1456,7 @@ C5 C0 true - true + false false 1 false @@ -1453,7 +1473,7 @@ C6 C0 false - true + false false 1 false @@ -1467,10 +1487,10 @@ #ff00ff 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -1487,7 +1507,7 @@ I1 C0 false - true + false false 1 false @@ -1504,7 +1524,7 @@ C1 C0 false - true + false false 1 false @@ -1518,10 +1538,10 @@ #ff00ff 0 0 - C45 + C44 C0 true - true + false false 1 false @@ -1538,7 +1558,7 @@ C1 C0 true - true + false false 1 false @@ -1555,7 +1575,7 @@ C5 C0 true - true + false false 1 false @@ -1572,7 +1592,7 @@ C0 C0 true - true + false false 1 false @@ -1586,10 +1606,10 @@ #ff00ff 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -1603,10 +1623,10 @@ #ff00ff 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -1623,7 +1643,7 @@ C1 C0 true - true + false false 1 false @@ -1637,10 +1657,10 @@ #ff00ff 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -1654,10 +1674,10 @@ #ff00ff 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -1671,10 +1691,10 @@ #ff00ff 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -1688,10 +1708,10 @@ #ff00ff 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -1705,10 +1725,10 @@ #ff00ff 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -1722,10 +1742,10 @@ #ff00ff 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -1739,10 +1759,10 @@ #ff00ff 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -1756,10 +1776,10 @@ #ff00ff 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -1776,7 +1796,7 @@ I1 C0 true - true + false false 3 false @@ -1793,7 +1813,7 @@ C0 C0 true - true + false false 1 false @@ -1810,7 +1830,7 @@ C6 C0 false - true + false false 1 false @@ -1827,7 +1847,7 @@ C5 C0 true - true + false false 1 false @@ -1841,10 +1861,10 @@ #00ffff 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -1861,7 +1881,7 @@ I1 C0 false - true + false false 1 false @@ -1878,7 +1898,7 @@ C1 C0 false - true + false false 1 false @@ -1892,10 +1912,10 @@ #00ffff 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -1912,8 +1932,8 @@ C1 C0 true - true - false + false + true 1 false false @@ -1929,7 +1949,7 @@ C5 C0 true - true + false false 1 false @@ -1946,7 +1966,7 @@ C0 C0 true - true + false false 1 false @@ -1960,10 +1980,10 @@ #00ffff 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -1977,10 +1997,10 @@ #00ffff 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -1997,7 +2017,7 @@ I1 C0 false - true + false false 1 false @@ -2014,7 +2034,7 @@ C1 C0 true - true + false false 1 false @@ -2028,10 +2048,10 @@ #00ffff 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -2045,10 +2065,10 @@ #00ffff 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -2062,10 +2082,10 @@ #00ffff 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -2079,10 +2099,10 @@ #00ffff 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -2096,10 +2116,10 @@ #00ffff 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -2113,10 +2133,10 @@ #00ffff 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -2130,10 +2150,10 @@ #00ffff 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -2147,10 +2167,10 @@ #00ffff 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -2167,7 +2187,7 @@ I1 C0 true - true + false false 3 false @@ -2184,7 +2204,7 @@ C0 C0 true - true + false false 1 false @@ -2201,7 +2221,7 @@ C6 C0 false - true + false false 1 false @@ -2218,7 +2238,7 @@ C5 C0 true - true + false false 1 false @@ -2235,7 +2255,7 @@ C15 C0 true - true + false false 1 false @@ -2252,7 +2272,7 @@ I1 C0 false - true + false false 1 false @@ -2269,7 +2289,7 @@ C1 C0 false - true + false false 1 false @@ -2283,10 +2303,10 @@ #5e00e6 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -2303,8 +2323,8 @@ C1 C0 true - true - false + false + true 1 false false @@ -2320,7 +2340,7 @@ C5 C0 true - true + false false 1 false @@ -2337,7 +2357,7 @@ C0 C0 true - true + false false 1 false @@ -2351,10 +2371,10 @@ #5e00e6 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -2368,10 +2388,10 @@ #5e00e6 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -2388,7 +2408,7 @@ I1 C0 false - true + false false 1 false @@ -2405,7 +2425,7 @@ C1 C0 true - true + false false 1 false @@ -2419,10 +2439,10 @@ #5e00e6 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -2436,10 +2456,10 @@ #5e00e6 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -2453,10 +2473,10 @@ #5e00e6 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -2470,10 +2490,10 @@ #5e00e6 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -2487,10 +2507,10 @@ #5e00e6 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -2504,10 +2524,10 @@ #5e00e6 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -2521,10 +2541,10 @@ #5e00e6 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -2538,10 +2558,10 @@ #5e00e6 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -2558,7 +2578,7 @@ I1 C0 true - true + false false 3 false @@ -2575,7 +2595,7 @@ C0 C0 true - true + false false 1 false @@ -2592,7 +2612,7 @@ C6 C0 false - true + false false 1 false @@ -2609,7 +2629,7 @@ C5 C0 true - true + false false 1 false @@ -2623,10 +2643,10 @@ #d9cc00 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -2643,7 +2663,7 @@ I1 C0 false - true + false false 1 false @@ -2660,7 +2680,7 @@ C1 C0 false - true + false false 1 false @@ -2674,10 +2694,10 @@ #d9cc00 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -2694,8 +2714,8 @@ C1 C0 true - true - false + false + true 1 false false @@ -2711,7 +2731,7 @@ C5 C0 true - true + false false 1 false @@ -2728,7 +2748,7 @@ C0 C0 true - true + false false 1 false @@ -2742,10 +2762,10 @@ #d9cc00 0 0 - C53 + C52 C0 true - true + false false 1 false @@ -2759,10 +2779,10 @@ #d9cc00 0 0 - C36 + C35 C0 true - true + false false 1 false @@ -2779,7 +2799,7 @@ I1 C0 false - true + false false 1 false @@ -2796,7 +2816,7 @@ C1 C0 true - true + false false 1 false @@ -2810,10 +2830,10 @@ #d9cc00 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -2827,10 +2847,10 @@ #d9cc00 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -2844,10 +2864,10 @@ #d9cc00 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -2861,10 +2881,10 @@ #d9cc00 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -2878,10 +2898,10 @@ #d9cc00 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -2895,10 +2915,10 @@ #d9cc00 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -2912,10 +2932,10 @@ #d9cc00 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -2929,10 +2949,10 @@ #d9cc00 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -2946,10 +2966,10 @@ #00cc66 0 0 - C50 + C49 C0 true - true + false false 1 false @@ -2963,10 +2983,10 @@ #ffffcc 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -2983,7 +3003,7 @@ C1 C0 true - true + false false 1 false @@ -2997,10 +3017,10 @@ #d9e6ff 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -3017,7 +3037,7 @@ I1 C0 true - true + false false 1 false @@ -3034,7 +3054,7 @@ C1 C0 true - true + false false 1 false @@ -3051,7 +3071,7 @@ I1 C0 true - true + false false 1 false @@ -3068,7 +3088,7 @@ C1 C0 true - true + false false 1 false @@ -3082,10 +3102,10 @@ #96c8ff 0 0 - C38 + C37 C0 true - true + false false 1 false @@ -3099,10 +3119,10 @@ #c896ff 0 0 - C38 + C37 C0 true - true + false false 1 false @@ -3119,7 +3139,7 @@ C4 C0 true - true + false false 1 false @@ -3136,7 +3156,7 @@ C0 C0 true - true + false false 3 false @@ -3153,7 +3173,7 @@ C14 C0 true - true + false false 1 false @@ -3170,7 +3190,7 @@ C0 C0 true - true + false false 1 false @@ -3187,7 +3207,7 @@ C0 C0 true - true + false false 1 false @@ -3201,10 +3221,10 @@ #ffe6bf 0 0 - C20 + C19 C1 true - true + false false 1 false @@ -3218,10 +3238,10 @@ #bf4026 0 0 - C40 + C39 C0 true - true + false false 1 false @@ -3235,10 +3255,10 @@ #e61f0d 0 0 - C47 + C46 C0 true - true + false false 1 false @@ -3252,10 +3272,10 @@ #e61f0d 0 0 - C34 + C33 C0 true - true + false false 1 false @@ -3272,7 +3292,7 @@ C1 C0 true - true + false false 1 false @@ -3289,7 +3309,7 @@ I1 C0 true - true + false false 1 false @@ -3306,7 +3326,7 @@ C1 C0 true - true + false false 1 false @@ -3320,10 +3340,10 @@ #e61f0d 0 0 - C36 + C35 C0 false - true + false false 1 false @@ -3337,10 +3357,10 @@ #e61f0d 0 0 - C25 + C24 C0 false - true + false false 1 false @@ -3354,10 +3374,10 @@ #e61f0d 0 0 - C26 + C25 C0 false - true + false false 1 false @@ -3371,10 +3391,10 @@ #e61f0d 0 0 - C27 + C26 C0 false - true + false false 1 false @@ -3388,10 +3408,10 @@ #e61f0d 0 0 - C28 + C27 C0 false - true + false false 1 false @@ -3405,10 +3425,10 @@ #e61f0d 0 0 - C29 + C28 C0 false - true + false false 1 false @@ -3422,10 +3442,10 @@ #e61f0d 0 0 - C30 + C29 C0 false - true + false false 1 false @@ -3439,10 +3459,10 @@ #e61f0d 0 0 - C31 + C30 C0 false - true + false false 1 false @@ -3456,10 +3476,10 @@ #e61f0d 0 0 - C32 + C31 C0 false - true + false false 1 false @@ -3476,7 +3496,7 @@ C7 C0 true - true + false false 1 false @@ -3490,10 +3510,10 @@ #ffbff2 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -3510,7 +3530,7 @@ C0 C0 true - true + false false 1 false @@ -3527,7 +3547,7 @@ C1 C0 true - true + false false 1 false @@ -3541,10 +3561,10 @@ #ffffff 0 0 - C25 + C24 C0 true - true + false false 1 false @@ -3558,10 +3578,10 @@ #ffffff 0 0 - C26 + C25 C0 true - true + false false 1 false @@ -3575,10 +3595,10 @@ #ffffff 0 0 - C27 + C26 C0 true - true + false false 1 false @@ -3592,10 +3612,10 @@ #ccccd9 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -3612,7 +3632,7 @@ C13 C0 true - true + false false 1 false @@ -3629,7 +3649,7 @@ C14 C0 true - true + false false 1 false @@ -3646,7 +3666,7 @@ C11 C0 true - true + false false 1 false @@ -3663,7 +3683,7 @@ I1 C0 true - true + false false 1 false @@ -3677,10 +3697,10 @@ #ccccd9 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -3694,10 +3714,10 @@ #268c6b 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -3714,7 +3734,7 @@ C13 C0 true - true + false false 1 false @@ -3731,7 +3751,7 @@ C14 C0 false - true + false false 1 false @@ -3748,7 +3768,7 @@ C11 C0 false - true + false false 1 false @@ -3765,7 +3785,7 @@ C0 C0 true - true + false false 1 false @@ -3782,7 +3802,7 @@ C17 C0 true - true + false false 1 false @@ -3799,7 +3819,7 @@ C14 C0 true - true + false false 1 false @@ -3816,7 +3836,7 @@ C3 C0 true - true + false false 1 false @@ -3833,7 +3853,7 @@ C0 C0 false - true + false false 1 false @@ -3850,7 +3870,7 @@ C0 C0 true - true + false false 1 false @@ -3867,7 +3887,7 @@ C14 C0 false - true + false false 1 false @@ -3884,7 +3904,7 @@ C3 C0 false - true + false false 1 false @@ -3901,7 +3921,7 @@ C0 C0 false - true + false false 1 false @@ -3918,7 +3938,7 @@ C0 C0 true - true + false false 1 false @@ -3935,7 +3955,7 @@ C14 C0 false - true + false false 1 false @@ -3952,7 +3972,7 @@ C3 C0 false - true + false false 1 false @@ -3969,7 +3989,7 @@ C0 C0 false - true + false false 1 false @@ -3986,7 +4006,7 @@ C0 C0 false - true + false false 1 false @@ -4003,7 +4023,7 @@ C14 C0 false - true + false false 1 false @@ -4020,7 +4040,7 @@ C3 C0 false - true + false false 1 false @@ -4037,7 +4057,7 @@ C0 C0 true - true + false false 1 false @@ -4054,7 +4074,7 @@ C0 C0 true - true + false false 1 false @@ -4071,7 +4091,7 @@ C14 C0 true - true + false false 1 false @@ -4088,7 +4108,7 @@ C3 C0 true - true + false false 1 false @@ -4105,7 +4125,7 @@ C0 C0 true - true + false false 1 false @@ -4122,7 +4142,7 @@ C0 C0 true - true + false false 1 false @@ -4139,7 +4159,7 @@ C14 C0 true - true + false false 1 false @@ -4156,7 +4176,7 @@ C3 C0 true - true + false false 1 false @@ -4170,10 +4190,10 @@ #00cc66 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -4190,7 +4210,7 @@ C13 C0 true - true + false false 1 false @@ -4207,7 +4227,7 @@ C14 C0 true - true + false false 1 false @@ -4224,7 +4244,7 @@ C11 C0 true - true + false false 1 false @@ -4238,10 +4258,10 @@ #ffff00 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -4258,7 +4278,7 @@ C13 C0 true - true + false false 1 false @@ -4275,7 +4295,7 @@ C14 C0 true - true + false false 1 false @@ -4292,7 +4312,7 @@ C11 C0 true - true + false false 1 false @@ -4306,10 +4326,10 @@ #d9cc00 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -4326,7 +4346,7 @@ C13 C0 true - true + false false 1 false @@ -4343,7 +4363,7 @@ C14 C0 false - true + false false 1 false @@ -4360,7 +4380,7 @@ C11 C0 false - true + false false 1 false @@ -4374,10 +4394,10 @@ #ffff00 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -4391,10 +4411,10 @@ #fff5e6 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -4411,7 +4431,7 @@ C13 C0 true - true + false false 1 false @@ -4428,7 +4448,7 @@ C14 C0 false - true + false false 1 false @@ -4445,7 +4465,7 @@ C11 C0 false - true + false false 1 false @@ -4459,10 +4479,10 @@ #00cc66 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -4479,7 +4499,7 @@ C13 C0 true - true + false false 1 false @@ -4496,7 +4516,7 @@ C0 C0 true - true + false false 1 false @@ -4513,7 +4533,7 @@ C17 C0 true - true + false false 1 false @@ -4530,7 +4550,7 @@ C14 C0 false - true + false false 1 false @@ -4547,7 +4567,7 @@ C3 C0 false - true + false false 1 false @@ -4561,10 +4581,10 @@ #ff8000 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -4581,7 +4601,7 @@ C13 C0 true - true + false false 1 false @@ -4598,7 +4618,7 @@ C14 C0 true - true + false false 1 false @@ -4615,7 +4635,7 @@ I1 C0 true - true + false false 1 false @@ -4632,7 +4652,7 @@ C11 C0 true - true + false false 1 false @@ -4649,7 +4669,7 @@ C0 C0 false - true + false false 1 false @@ -4666,7 +4686,7 @@ C11 C0 true - true + false false 1 false @@ -4683,7 +4703,7 @@ C14 C0 true - true + false false 1 false @@ -4700,7 +4720,7 @@ C3 C0 true - true + false false 1 false @@ -4717,7 +4737,7 @@ C0 C0 false - true + false false 1 false @@ -4734,7 +4754,7 @@ C0 C0 true - true + false false 1 false @@ -4751,7 +4771,7 @@ C14 C0 true - true + false false 1 false @@ -4768,7 +4788,7 @@ C3 C0 true - true + false false 1 false @@ -4782,10 +4802,10 @@ #0000ff 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -4802,7 +4822,7 @@ C13 C0 true - true + false false 1 false @@ -4819,7 +4839,7 @@ C14 C0 false - true + false false 1 false @@ -4836,7 +4856,7 @@ C11 C0 false - true + false false 1 false @@ -4853,7 +4873,7 @@ I1 C0 true - true + false false 1 false @@ -4870,7 +4890,7 @@ C0 C0 false - true + false false 1 false @@ -4887,7 +4907,7 @@ C17 C0 true - true + false false 1 false @@ -4904,7 +4924,7 @@ C14 C0 false - true + false false 1 false @@ -4921,7 +4941,7 @@ C3 C0 false - true + false false 1 false @@ -4935,10 +4955,10 @@ #ffbff2 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -4955,7 +4975,7 @@ C13 C0 true - true + false false 1 false @@ -4972,7 +4992,7 @@ C14 C0 false - true + false false 1 false @@ -4989,7 +5009,7 @@ C11 C0 false - true + false false 1 false @@ -5006,7 +5026,7 @@ I1 C0 true - true + false false 1 false @@ -5023,7 +5043,7 @@ C0 C0 false - true + false false 1 false @@ -5040,7 +5060,7 @@ C17 C0 true - true + false false 1 false @@ -5057,7 +5077,7 @@ C14 C0 false - true + false false 1 false @@ -5074,7 +5094,7 @@ C3 C0 false - true + false false 1 false @@ -5088,10 +5108,10 @@ #5e00e6 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -5108,7 +5128,7 @@ C13 C0 true - true + false false 1 false @@ -5125,7 +5145,7 @@ C14 C0 false - true + false false 1 false @@ -5142,7 +5162,7 @@ C11 C0 false - true + false false 1 false @@ -5159,7 +5179,7 @@ I1 C0 true - true + false false 1 false @@ -5176,7 +5196,7 @@ C0 C0 true - true + false false 1 false @@ -5190,10 +5210,10 @@ #e61f0d 0 0 - C39 + C38 C0 true - true + false false 1 false @@ -5210,7 +5230,7 @@ C14 C0 false - true + false false 1 false @@ -5227,7 +5247,7 @@ C3 C0 false - true + false false 1 false @@ -5244,7 +5264,7 @@ C0 C0 false - true + false false 1 false @@ -5261,7 +5281,7 @@ C17 C0 true - true + false false 1 false @@ -5278,7 +5298,7 @@ C14 C0 false - true + false false 1 false @@ -5295,7 +5315,7 @@ C3 C0 false - true + false false 1 false @@ -5309,10 +5329,10 @@ #00cc66 0 0 - C20 + C19 C0 true - true + false false 1 false @@ -5326,10 +5346,10 @@ #ffe6bf 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -5346,7 +5366,7 @@ C13 C0 true - true + false false 1 false @@ -5363,7 +5383,7 @@ C14 C0 false - true + false false 1 false @@ -5380,7 +5400,7 @@ C11 C0 false - true + false false 1 false @@ -5397,7 +5417,7 @@ C0 C0 true - true + false false 1 false @@ -5414,7 +5434,7 @@ C13 C0 true - true + false false 1 false @@ -5431,7 +5451,7 @@ C13 C0 true - true + false false 1 false @@ -5448,7 +5468,7 @@ C14 C0 true - true + false false 1 false @@ -5465,7 +5485,7 @@ C11 C0 true - true + false false 1 false @@ -5482,7 +5502,7 @@ I1 C0 true - true + false false 1 false @@ -5499,7 +5519,7 @@ C0 C0 false - true + false false 1 false @@ -5516,7 +5536,7 @@ C17 C0 true - true + false false 1 false @@ -5533,7 +5553,7 @@ C14 C0 false - true + false false 1 false @@ -5550,7 +5570,7 @@ C3 C0 false - true + false false 1 false @@ -5567,7 +5587,7 @@ C13 C0 true - true + false false 1 false @@ -5584,7 +5604,7 @@ I1 C0 true - true + false false 1 false @@ -5601,7 +5621,7 @@ C0 C0 true - true + false false 1 false @@ -5618,7 +5638,7 @@ C0 C0 false - true + false false 1 false @@ -5635,7 +5655,7 @@ C17 C0 true - true + false false 1 false @@ -5652,7 +5672,7 @@ C14 C0 false - true + false false 1 false @@ -5669,7 +5689,7 @@ C3 C0 false - true + false false 1 false @@ -5686,7 +5706,7 @@ C0 C0 true - true + false false 1 false @@ -5703,7 +5723,7 @@ C0 C0 true - true + false false 1 false @@ -5720,7 +5740,7 @@ C14 C0 true - true + false false 1 false @@ -5737,7 +5757,7 @@ C3 C0 true - true + false false 1 false @@ -5751,10 +5771,10 @@ #e61f0d 0 0 - C47 + C46 C0 false - true + false false 1 false @@ -5768,10 +5788,10 @@ #bf4026 0 0 - C40 + C39 C0 false - true + false false 1 false @@ -5788,7 +5808,7 @@ C7 C0 false - true + false false 1 false @@ -5802,10 +5822,10 @@ #ffbff2 0 0 - C20 + C19 C0 false - true + false false 1 false @@ -5822,7 +5842,7 @@ C0 C0 true - true + false false 3 false @@ -5839,7 +5859,7 @@ C0 C0 true - true + false false 3 false @@ -5856,7 +5876,7 @@ C0 C0 true - true + false false 3 false @@ -5873,7 +5893,7 @@ C0 C0 true - true + false false 3 false @@ -5890,7 +5910,7 @@ C2 C0 true - true + false false 3 false @@ -5907,7 +5927,7 @@ C2 C0 true - true + false false 3 false @@ -5924,7 +5944,7 @@ C0 C0 true - true + false false 3 false @@ -5941,7 +5961,7 @@ C0 C0 true - true + false false 3 false @@ -5958,7 +5978,7 @@ C0 C0 true - true + false false 3 false @@ -5975,7 +5995,7 @@ C0 C0 true - true + false false 3 false @@ -5992,7 +6012,7 @@ C0 C0 true - true + false false 3 false @@ -6009,7 +6029,7 @@ C0 C0 true - true + false false 3 false @@ -6026,7 +6046,7 @@ C0 C0 true - true + false false 3 false @@ -6040,10 +6060,10 @@ #ccccd9 0 0 - C22 + C21 C0 true - true + false false 1 false @@ -6060,7 +6080,7 @@ C0 C0 true - true + false false 3 false @@ -6077,7 +6097,7 @@ C0 C0 true - true + false false 3 false @@ -6094,7 +6114,7 @@ C0 C5 true - true + false false 1 false @@ -6111,7 +6131,7 @@ C0 C5 true - true + false false 1 false @@ -6128,7 +6148,7 @@ C0 C5 true - true + false false 1 false @@ -6142,10 +6162,10 @@ #c8ffc8 0 0 - C20 + C19 C0 true - true + false false 3 false @@ -6162,7 +6182,7 @@ C1 C0 true - true + false false 3 false @@ -6179,7 +6199,7 @@ C0 C0 true - true + false false 3 false @@ -6196,7 +6216,7 @@ C0 C0 true - true + false false 3 false @@ -6213,7 +6233,7 @@ C0 C0 true - true + false false 3 false @@ -6230,7 +6250,7 @@ C0 C0 true - true + false false 3 false @@ -6247,7 +6267,7 @@ C0 C0 true - true + false false 3 false @@ -6264,7 +6284,7 @@ C0 C0 true - true + false false 3 false @@ -6281,7 +6301,7 @@ C0 C0 true - true + false false 3 false @@ -6298,7 +6318,7 @@ C0 C0 true - true + false false 3 false @@ -6315,7 +6335,7 @@ C0 C0 true - true + false false 3 false @@ -6332,7 +6352,7 @@ C0 C0 true - true + false false 3 false @@ -6349,7 +6369,7 @@ C0 C0 true - true + false false 1 false @@ -6366,7 +6386,7 @@ C0 C0 true - true + false false 1 false @@ -6383,7 +6403,7 @@ C7 C0 true - true + false false 1 false @@ -6397,10 +6417,10 @@ #8c8ca6 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6414,10 +6434,10 @@ #8c8ca6 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6434,7 +6454,7 @@ C15 C0 true - true + false false 1 false @@ -6448,10 +6468,10 @@ #8c8ca6 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6468,7 +6488,7 @@ C7 C0 true - true + false false 1 false @@ -6482,10 +6502,10 @@ #00ffe7 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6499,10 +6519,10 @@ #00ffe7 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6519,7 +6539,7 @@ C15 C0 true - true + false false 1 false @@ -6533,10 +6553,10 @@ #00ffe7 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6553,7 +6573,7 @@ C7 C0 true - true + false false 1 false @@ -6567,10 +6587,10 @@ #ffffcc 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6584,10 +6604,10 @@ #ffffcc 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6604,7 +6624,7 @@ C15 C0 true - true + false false 1 false @@ -6618,10 +6638,10 @@ #ffffcc 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6638,7 +6658,7 @@ C7 C0 true - true + false false 1 false @@ -6652,10 +6672,10 @@ #802626 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6669,10 +6689,10 @@ #802626 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6689,7 +6709,7 @@ C15 C0 true - true + false false 1 false @@ -6703,10 +6723,10 @@ #802626 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6723,7 +6743,7 @@ C7 C0 true - true + false false 1 false @@ -6737,10 +6757,10 @@ #333399 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6754,10 +6774,10 @@ #333399 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6774,7 +6794,7 @@ C15 C0 true - true + false false 1 false @@ -6788,10 +6808,10 @@ #333399 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6808,7 +6828,7 @@ C7 C0 true - true + false false 1 false @@ -6822,10 +6842,10 @@ #fa8072 0 0 - C37 + C36 C0 true - true + false false 1 false @@ -6839,10 +6859,10 @@ #fa8072 0 0 - C49 + C48 C0 true - true + false false 1 false @@ -6859,7 +6879,7 @@ C15 C0 true - true + false false 1 false @@ -6873,10 +6893,10 @@ #fa8072 0 0 - C42 + C41 C0 true - true + false false 1 false @@ -6893,7 +6913,7 @@ C10 C0 true - true + false false 1 false @@ -6910,7 +6930,7 @@ C10 C0 true - true + false false 1 false @@ -6927,7 +6947,7 @@ C10 C0 true - true + false false 1 false @@ -6944,7 +6964,7 @@ C10 C0 true - true + false false 1 false @@ -6961,7 +6981,7 @@ C10 C0 true - true + false false 1 false @@ -6978,7 +6998,7 @@ C10 C0 true - true + false false 1 false @@ -6992,10 +7012,10 @@ #ffe6bf 0 0 - C20 + C19 C1 false - true + false false 1 false @@ -7012,7 +7032,7 @@ I5 true - true + false false false @@ -7029,7 +7049,7 @@ I9 true - true + false false false @@ -7046,7 +7066,7 @@ I5 true - true + false false false @@ -7063,7 +7083,7 @@ I9 true - true + false false false @@ -7080,7 +7100,7 @@ I5 true - true + false false false @@ -7097,7 +7117,7 @@ I9 true - true + false false false @@ -7114,7 +7134,7 @@ I5 true - true + false false false @@ -7131,7 +7151,7 @@ I9 true - true + false false false @@ -7148,7 +7168,7 @@ I5 true - true + false false false @@ -7165,7 +7185,7 @@ I9 true - true + false false false @@ -7182,7 +7202,7 @@ C0 true - true + false false false @@ -7199,7 +7219,7 @@ I9 true - true + false false false @@ -7216,7 +7236,7 @@ I5 true - true + false false false @@ -7233,7 +7253,7 @@ C0 true - true + false false false @@ -7250,7 +7270,7 @@ C0 true - true + false false false @@ -7259,6 +7279,40 @@ OUTLINE 236/0@1 236/0@1 + + #004080 + #004080 + 0 + 0 + I5 + + true + false + false + + false + false + 0 + capm.drawing 89/44 + 89/44@1 + + + #01ff6b + #01ff6b + 0 + 0 + I9 + + true + false + false + + false + false + 0 + cap2m.drawing 97/44 + 97/44@1 + GDS @@ -7656,28 +7710,6 @@ 18 triangle - - - *...*...*...*... - .*.*.*.*.*.*.*.* - ..*...*...*...*. - .*.*.*.*.*.*.*.* - *...*...*...*... - .*.*.*.*.*.*.*.* - ..*...*...*...*. - .*.*.*.*.*.*.*.* - *...*...*...*... - .*.*.*.*.*.*.*.* - ..*...*...*...*. - .*.*.*.*.*.*.*.* - *...*...*...*... - .*.*.*.*.*.*.*.* - ..*...*...*...*. - .*.*.*.*.*.*.*.* - - 19 - x - ................ @@ -7697,7 +7729,7 @@ ................ ................ - 20 + 19 Xone @@ -7719,7 +7751,7 @@ ................ ................ - 21 + 20 Xtwo @@ -7741,7 +7773,7 @@ ..*.......*..... ................ - 22 + 21 spareDots @@ -7763,7 +7795,7 @@ ................ ................ - 23 + 22 spareDots21 @@ -7785,7 +7817,7 @@ ................ ................ - 24 + 23 spareDots22 @@ -7807,7 +7839,7 @@ ....****....**** ....****....**** - 25 + 24 checker @@ -7829,7 +7861,7 @@ ****....****.... ****....****.... - 26 + 25 checker2 @@ -7851,7 +7883,7 @@ ................ ................ - 27 + 26 one @@ -7873,7 +7905,7 @@ ................ ................ - 28 + 27 two @@ -7895,7 +7927,7 @@ ................ ................ - 29 + 28 three @@ -7917,7 +7949,7 @@ .............*.. ................ - 30 + 29 four @@ -7939,7 +7971,7 @@ ................ ................ - 31 + 30 five @@ -7961,7 +7993,7 @@ ................ ................ - 32 + 31 six @@ -7983,7 +8015,7 @@ ................ ................ - 33 + 32 seven @@ -8005,7 +8037,7 @@ ................ ................ - 34 + 33 eight @@ -8027,7 +8059,7 @@ .*............*. *..............* - 35 + 34 box45 @@ -8049,7 +8081,7 @@ .*.*.*.*.*.*.*.* *.*.*.*.*.*.*.*. - 36 + 35 gray50 @@ -8071,7 +8103,7 @@ ..*...*...*...*. ................ - 37 + 36 gray25 @@ -8093,7 +8125,7 @@ ...*...*...*...* ................ - 38 + 37 snow @@ -8115,7 +8147,7 @@ *.......*....... .*.......*...... - 39 + 38 backSlash2 @@ -8137,7 +8169,7 @@ *.....*.*.....*. ...*...*...*...* - 40 + 39 lattice @@ -8159,7 +8191,7 @@ ..**..**..**..** ..**..**..**..** - 41 + 40 smallChecker @@ -8181,7 +8213,7 @@ ..........*.*... ...........*.... - 42 + 41 slantBox @@ -8203,7 +8235,7 @@ ...*...*...*...* ..*...*...*...*. - 43 + 42 slash2 @@ -8225,7 +8257,7 @@ .....*.......*.. ....*.......*... - 44 + 43 bigSlash @@ -8247,7 +8279,7 @@ ................ ................ - 45 + 44 boxes @@ -8269,7 +8301,7 @@ ................ ................ - 46 + 45 circles @@ -8291,7 +8323,7 @@ ...*...*...*...* .**..**..**..**. - 47 + 46 zigzag @@ -8313,7 +8345,7 @@ ................ ...*....*....*.. - 48 + 47 lightMesh @@ -8335,7 +8367,7 @@ .*.............. *............... - 49 + 48 hugeSlash @@ -8357,7 +8389,7 @@ ..............*. ...............* - 50 + 49 hugeSlash2 @@ -8379,7 +8411,7 @@ ....*.........*. ...........*.... - 51 + 50 curve @@ -8401,7 +8433,7 @@ *............*.. ..........*..... - 52 + 51 curve2 @@ -8423,7 +8455,7 @@ ..*.*........... ...*............ - 53 + 52 diams @@ -8445,7 +8477,7 @@ ..*.*........... ...*............ - 54 + 53 sparsediam @@ -8467,9 +8499,16 @@ .........*...... ........*....... - 55 + 54 rain + + + * + + 55 + + *** 1 @@ -8506,8 +8545,8 @@ hidden - *** + 8 - thickLine + diff --git a/sky130/klayout/sky130_mr.drc b/sky130/klayout/sky130_mr.drc new file mode 100644 index 00000000..a258319d --- /dev/null +++ b/sky130/klayout/sky130_mr.drc @@ -0,0 +1,794 @@ +# DRC for SKY130 according to : +# https://skywater-pdk.readthedocs.io/en/latest/rules/periphery.html +# https://skywater-pdk.readthedocs.io/en/latest/rules/layers.html +# +# Distributed under GNU GPLv3: https://www.gnu.org/licenses/ +# +# History : +# 2022-6-22 : 2022.6.30_01.07 release +# +########################################################################################## +release = "2022.6.30_01.07" + +require 'time' +require "logger" + +exec_start_time = Time.now + +logger = Logger.new(STDOUT) + +logger.formatter = proc do |severity, datetime, progname, msg| + "#{msg} +" +end +# optionnal for a batch launch : klayout -b -rd input=my_layout.gds -rd report=sky130_drc.txt -r drc_sky130.drc +if $input + source($input, $top_cell) +end + +if $report + report("SKY130 DRC runset", $report) +else + report("SKY130 DRC runset", File.join(File.dirname(RBA::CellView::active.filename), "sky130_drc.txt")) +end + +AL = true # do not change +CU = false # do not change +# choose betwen only one of AL or CU back-end flow here : +backend_flow = AL + +FEOL = false +BEOL = false +OFFGRID = false +SEAL = false +FLOATING_MET = false + +# enable / disable rule groups +if $feol == "1" || $feol == "true" + FEOL = true # front-end-of-line checks +else + FEOL = false +end + +if $beol == "1" || $beol == "true" + BEOL = true # back-end-of-line checks +else + BEOL = false +end + +if $offgrid == "1" || $offgrid == "true" + OFFGRID = true # manufacturing grid/angle checks +else + OFFGRID = false +end + +if $seal == "1" || $seal == "true" + SEAL = true # SEAL RING checks +else + SEAL = false +end + +if $floating_met == "1" || $floating_met == "true" + FLOATING_MET = true # back-end-of-line checks +else + FLOATING_MET = false +end + +# klayout setup +######################## +# use a tile size of 1mm - not used in deep mode- +# tiles(1000.um) +# use a tile border of 10 micron: +# tile_borders(1.um) +#no_borders + +# hierachical +deep + +if $thr + threads($thr) +else + threads(4) +end + +# if more inof is needed, set true +# verbose(true) +verbose(true) + +# layers definitions +######################## + +# all except purpose (datatype) 5 -- label and 44 -- via +li_wildcard = "67/20" +mcon_wildcard = "67/44" + +m1_wildcard = "68/20" +via_wildcard = "68/44" + +m2_wildcard = "69/20" +via2_wildcard = "69/44" + +m3_wildcard = "70/20" +via3_wildcard = "70/44" + +m4_wildcard = "71/20" +via4_wildcard = "71/44" + +m5_wildcard = "72/20" + +nsdm_wildcard = "93/44" + +psdm_wildcard = "94/20" +nwell_wildcard = "64/20" + +diff = input(65, 20) +tap = polygons(65, 44) +nwell = polygons(nwell_wildcard) +dnwell = polygons(64, 18) +pwbm = polygons(19, 44) +pwde = polygons(124, 20) +natfet = polygons(124, 21) +hvtr = polygons(18, 20) +hvtp = polygons(78, 44) +ldntm = polygons(11, 44) +hvi = polygons(75, 20) +tunm = polygons(80, 20) +lvtn = polygons(125, 44) +poly = polygons(66, 20) +hvntm = polygons(125, 20) +nsdm = polygons(nsdm_wildcard) +psdm = polygons(psdm_wildcard) +rpm = polygons(86, 20) +urpm = polygons(79, 20) +npc = polygons(95, 20) +licon = polygons(66, 44) + +li = polygons(li_wildcard) +mcon = polygons(mcon_wildcard) + +m1 = polygons(m1_wildcard) +via = polygons(via_wildcard) + +m2 = polygons(m2_wildcard) +via2 = polygons(via2_wildcard) + +m3 = polygons(m3_wildcard) +via3 = polygons(via3_wildcard) + +m4 = polygons(m4_wildcard) +via4 = polygons(via4_wildcard) + +m5 = polygons(m5_wildcard) + +pad = polygons(76, 20) +nsm = polygons(61, 20) +capm = polygons(89, 44) +cap2m = polygons(97, 44) +vhvi = polygons(74, 21) +uhvi = polygons(74, 22) +npn = polygons(82, 20) +inductor = polygons(82, 24) +vpp = polygons(82, 64) +pnp = polygons(82, 44) +lvs_prune = polygons(84, 44) +ncm = polygons(92, 44) +padcenter = polygons(81, 20) +mf = polygons(76, 44) +areaid_sl = polygons(81, 1) +areaid_ce = polygons(81, 2) +areaid_fe = polygons(81, 3) +areaid_sc = polygons(81, 4) +areaid_sf = polygons(81, 6) +areaid_sw = polygons(81, 7) +areaid_sr = polygons(81, 8) +areaid_mt = polygons(81, 10) +areaid_dt = polygons(81, 11) +areaid_ft = polygons(81, 12) +areaid_ww = polygons(81, 13) +areaid_ld = polygons(81, 14) +areaid_ns = polygons(81, 15) +areaid_ij = polygons(81, 17) +areaid_zr = polygons(81, 18) +areaid_ed = polygons(81, 19) +areaid_de = polygons(81, 23) +areaid_rd = polygons(81, 24) +areaid_dn = polygons(81, 50) +areaid_cr = polygons(81, 51) +areaid_cd = polygons(81, 52) +areaid_st = polygons(81, 53) +areaid_op = polygons(81, 54) +areaid_en = polygons(81, 57) +areaid_en20 = polygons(81, 58) +areaid_le = polygons(81, 60) +areaid_hl = polygons(81, 63) +areaid_sd = polygons(81, 70) +areaid_po = polygons(81, 81) +areaid_it = polygons(81, 84) +areaid_et = polygons(81, 101) +areaid_lvt = polygons(81, 108) +areaid_re = polygons(81, 125) +areaid_ag = polygons(81, 79) +poly_rs = polygons(66, 13) +diff_rs = polygons(65, 13) +pwell_rs = polygons(64, 13) +li_rs = polygons(67, 13) +cfom = polygons(22, 20) + + +# Define a new custom function that selects polygons by their number of holes: +# It will return a new layer containing those polygons with min to max holes. +# max can be nil to omit the upper limit. +class DRC::DRCLayer + def with_holes(min, max) + new_data = RBA::Region::new + self.data.each do |p| + if p.holes >= (min || 0) && (!max || p.holes <= max) + new_data.insert(p) + end + end + DRC::DRCLayer::new(@engine, new_data) + end +end + +# DRC section +######################## +log("DRC section") + +if FEOL +log("FEOL section") +# dnwell +log("START: 64/18 (dnwell)") +dnwell.width(3.0, euclidian).output("dnwell.2", "dnwell.2 : min. dnwell width : 3.0um") +log("END: 64/18 (dnwell)") + +not_sram = layout(source.cell_obj).select("-*sky130_sram_*kbyte_*") +not_sram_nsdm = not_sram.input(nsdm_wildcard) +not_sram_psdm = not_sram.input(psdm_wildcard) +not_sram_nwell = not_sram.input(nwell_wildcard) + +# This is a hack, should be reverted + +not_io = layout(source.cell_obj).select("-*sky130_fd_io__gpiov2_amux", "-*sky130_fd_io__simple_pad_and_busses") +not_io_nwell = not_io.input(nwell_wildcard) + +# nwell +log("START: 64/20 (nwell)") +nwell.width(0.84, euclidian).output("nwell.1", "nwell.1 : min. nwell width : 0.84um") +nwell.space(1.27, euclidian).output("nwell.2a", "nwell.2a : min. nwell spacing (merged if less) : 1.27um") +nwell_interact = not_sram_nwell.and(not_io_nwell).merge +dnwell.enclosing(nwell_interact.holes, 1.03, euclidian).output("nwell.6", "nwell.6 : min enclosure of nwellHole by dnwell : 1.03um") +log("END: 64/20 (nwell)") + +# hvtp +log("START: 78/44 (hvtp)") +hvtp.width(0.38, euclidian).output("hvtp.1", "hvtp.1 : min. hvtp width : 0.38um") +hvtp.space(0.38, euclidian).output("hvtp.2", "hvtp.2 : min. hvtp spacing : 0.38um") +log("END: 78/44 (hvtp)") + +# hvtr +log("START: 18/20 (htvr)") +hvtr.width(0.38, euclidian).output("hvtr.1", "hvtr.1 : min. hvtr width : 0.38um") +hvtr.separation(hvtp, 0.38, euclidian).output("hvtr.2", "hvtr.2 : min. hvtr spacing : 0.38um") +hvtr.and(hvtp).output("hvtr.2_a", "hvtr.2_a : hvtr must not overlap hvtp") +log("END: 18/20 (htvr)") + +# lvtn +log("START: 25/44 (lvtn)") +lvtn.width(0.38, euclidian).output("lvtn.1a", "lvtn.1a : min. lvtn width : 0.38um") +lvtn.space(0.38, euclidian).output("lvtn.2", "lvtn.2 : min. lvtn spacing : 0.38um") +log("END: 25/44 (lvtn)") + +# ncm +log("START: 92/44 (ncm)") +ncm.width(0.38, euclidian).output("ncm.1", "ncm.1 : min. ncm width : 0.38um") +ncm.space(0.38, euclidian).output("ncm.2a", "ncm.2a : min. ncm spacing : 0.38um") +log("END: 92/44 (ncm)") + +# diff-tap +log("START: 65/20 (diff)") +difftap = diff.or(tap) +diff_width = diff.rectangles.width(0.15, euclidian).polygons +diff_cross_areaid_ce = diff_width.edges.outside_part(areaid_ce).not(diff_width.outside(areaid_ce).edges) +diff_cross_areaid_ce.output("difftap.1", "difftap.1 : min. diff width across areaid:ce : 0.15um") +diff.outside(areaid_ce).width(0.15, euclidian).output("difftap.1_a", "difftap.1_a : min. diff width in periphery : 0.15um") +log("END: 65/20 (diff)") + +log("START: 65/44 (tap)") +tap_width = tap.rectangles.width(0.15, euclidian).polygons +tap_cross_areaid_ce = tap_width.edges.outside_part(areaid_ce).not(tap_width.outside(areaid_ce).edges) +tap_cross_areaid_ce.output("difftap.1_b", "difftap.1_b : min. tap width across areaid:ce : 0.15um") +tap.not(areaid_ce).width(0.15, euclidian).output("difftap.1_c", "difftap.1_c : min. tap width in periphery : 0.15um") +log("END: 65/44 (tap)") + +difftap.space(0.27, euclidian).output("difftap.3", "difftap.3 : min. difftap spacing : 0.27um") + +# tunm +log("START: 80/20 (tunm)") +tunm.width(0.41, euclidian).output("tunm.1", "tunm.1 : min. tunm width : 0.41um") +tunm.space(0.5, euclidian).output("tunm.2", "tunm.2 : min. tunm spacing : 0.5um") +log("END: 80/20 (tunm)") + +# poly +log("START: 66/20 (poly)") +poly.width(0.15, euclidian).output("poly.1a", "poly.1a : min. poly width : 0.15um") +poly.not(areaid_ce).space(0.21, euclidian).output("poly.2", "poly.2 : min. poly spacing : 0.21um") + + +# rpm +log("START: 86/20 (rpm)") +rpm.width(1.27, euclidian).output("rpm.1a", "rpm.1a : min. rpm width : 1.27um") +rpm.space(0.84, euclidian).output("rpm.2", "rpm.2 : min. rpm spacing : 0.84um") +log("END: 86/20 (rpm)") + +# urpm +log("START: 79/20 (urpm)") +urpm.width(1.27, euclidian).output("urpm.1a", "urpm.1a : min. rpm width : 1.27um") +urpm.space(0.84, euclidian).output("urpm.2", "urpm.2 : min. rpm spacing : 0.84um") +log("END: 79/20 (urpm)") + +# npc +log("START: 95/20 (npc)") +npc.width(0.27, euclidian).output("npc.1", "npc.1 : min. npc width : 0.27um") +npc.space(0.27, euclidian).output("npc.2", "npc.2 : min. npc spacing, should be manually merged if less than : 0.27um") +log("END: 95/20 (npc)") + +# nsdm +log("START: 93/44 (nsdm)") +not_sram_nsdm.outside(areaid_ce).width(0.38, euclidian).output("nsd.1", "nsd.1 : min. nsdm width : 0.38um") +not_sram_nsdm.not(areaid_ce).space(0.38, euclidian).output("nsd.2", "nsd.2 : min. nsdm spacing, should be manually merged if less than : 0.38um") +log("END: 93/44 (nsdm)") + +# psdm +log("START: 94/20 (psdm)") +not_sram_psdm.outside(areaid_ce).width(0.38, euclidian).output("psd.1", "psd.1 : min. psdm width : 0.38um") +not_sram_psdm.not(areaid_ce).space(0.38, euclidian).output("psd.2", "psd.2 : min. psdm spacing, should be manually merged if less than : 0.38um") +log("END: 94/20 (psdm)") + +# licon +log("START: 66/44 (licon)") +if SEAL + ringLICON = licon.drc(with_holes > 0) + rectLICON = licon.not(ringLICON) +else + rectLICON = licon +end +xfom = difftap.not(poly) +licon1ToXfom = licon.interacting(licon.and(xfom)) +licon1ToXfom_PERI = licon1ToXfom.not(areaid_ce) +rectLICON.non_rectangles.output("licon.1", "licon.1 : licon should be rectangle") +rectLICON.not(rpm.or(urpm)).edges.without_length(0.17).output("licon.1_a/b", "licon.1_a/b : minimum/maximum width of licon : 0.17um") +licon1ToXfom_PERI.separation(npc, 0.09, euclidian).output("licon.13", "licon.13 : min. difftap licon spacing to npc : 0.09um") +licon1ToXfom_PERI.and(npc).output("licon.13_a", "licon.13_a : licon of diffTap in periphery must not overlap npc") +licon.interacting(poly).and(licon.interacting(difftap)).output("licon.17", "licon.17 : Licons may not overlap both poly and (diff or tap)") +log("END: 66/44 (licon)") + +# CAPM +log("START: 89/44 (capm)") +capm.width(1.0, euclidian).output("capm.1", "capm.1 : min. capm width : 1.0um") +capm.space(0.84, euclidian).output("capm.2a", "capm.2a : min. capm spacing : 0.84um") +m3.interacting(capm).isolated(1.2, euclidian).output("capm.2b", "capm.2b : min. capm spacing : 1.2um") +(m3.interacting(capm)).isolated(1.2, euclidian).output("capm.2b_a", "capm.2b_a : min. spacing of m3_bot_plate : 1.2um") +capm.and(m3).enclosing(m3, 0.14, euclidian).output("capm.3", "capm.3 : min. capm and m3 enclosure of m3 : 0.14um") +m3.enclosing(capm, 0.14, euclidian).output("capm.3_a", "capm.3_a : min. m3 enclosure of capm : 0.14um") +capm.enclosing(via3, 0.14, euclidian).output("capm.4", "capm.4 : min. capm enclosure of via3 : 0.14um") +capm.separation(via3, 0.14, euclidian).output("capm.5", "capm.5 : min. capm spacing to via3 : 0.14um") +(m3.not_interacting(capm)).separation(capm, 0.5, euclidian).output("capm.11", "capm.11 : Min spacing of capm and met3 not overlapping capm : 0.5um") +log("END: 89/44 (capm)") + +# CAP2M +log("START: 97/44 (cap2m)") +cap2m.width(1.0, euclidian).output("cap2m.1", "cap2m.1 : min. cap2m width : 1.0um") +cap2m.space(0.84, euclidian).output("cap2m.2a", "cap2m.2a : min. cap2m spacing : 0.84um") +m4.interacting(cap2m).isolated(1.2, euclidian).output("cap2m.2b", "cap2m.2b : min. cap2m spacing : 1.2um") +(m4.interacting(cap2m)).isolated(1.2, euclidian).output("cap2m.2b_a", "cap2m.2b_a : min. spacing of m4_bot_plate : 1.2um") +cap2m.and(m4).enclosing(m4, 0.14, euclidian).output("cap2m.3", "cap2m.3 : min. m4 enclosure of cap2m : 0.14um") +m4.enclosing(cap2m, 0.14, euclidian).output("cap2m.3_a", "cap2m.3_a : min. m4 enclosure of cap2m : 0.14um") +cap2m.enclosing(via4, 0.2, euclidian).output("cap2m.4", "cap2m.4 : min. cap2m enclosure of via4 : 0.14um") +cap2m.separation(via4, 0.2, euclidian).output("cap2m.5", "cap2m.5 : min. cap2m spacing to via4 : 0.14um") +(m4.not_interacting(cap2m)).separation(cap2m, 0.5, euclidian).output("cap2m.11", "cap2m.11 : Min spacing of cap2m and met4 not overlapping cap2m : 0.5um") +log("END: 97/44 (cap2m)") +end #FEOL + +if BEOL +log("BEOL section") + +# li +log("START: 67/20 (li)") +linotace = li.not(li.interacting(areaid_ce)) +linotace.width(0.17, euclidian).output("li.1", "li.1 : min. li width : 0.17um") +# This rule is taking a long time in some slots +linotace.edges.space(0.17, euclidian).output("li.3", "li.3 : min. li spacing : 0.17um") +licon_peri = licon.not(areaid_ce) +li_edges_with_less_enclosure = li.enclosing(licon_peri, 0.08, projection).second_edges +error_corners = li_edges_with_less_enclosure.width(angle_limit(100.0), 1.dbu) +li_interact = licon_peri.interacting(error_corners.polygons(1.dbu)) +li_interact.output("li.5", "li.5 : min. li enclosure of licon of 2 adjacent edges : 0.08um") +linotace.with_area(nil, 0.0561).output("li.6", "li.6 : min. li area : 0.0561um²") +log("END: 67/20 (li)") + +# ct +log("START: 67/44 (mcon)") +mconnotace = mcon.not(areaid_ce) +if SEAL + ringMCON = mcon.drc(with_holes > 0) + rectMCON = mcon.not(ringMCON) +else + rectMCON = mcon +end +rectMCON_peri = rectMCON.not(areaid_ce) +rectMCON.non_rectangles.output("ct.1", "ct.1: non-ring mcon should be rectangular") +# rectMCON_peri.edges.without_length(0.17).output("ct.1_a/b", "ct.1_a/b : minimum/maximum width of mcon : 0.17um") +rectMCON_peri.drc(width < 0.17).output("ct.1_a", "ct.1_a : minimum width of mcon : 0.17um") +rectMCON_peri.drc(length > 0.17).output("ct.1_b", "ct.1_b : maximum length of mcon : 0.17um") +mcon.space(0.19, euclidian).output("ct.2", "ct.2 : min. mcon spacing : 0.19um") +if SEAL + ringMCON.width(0.17, euclidian).output("ct.3", "ct.3 : min. width of ring-shaped mcon : 0.17um") + ringMCON.drc(width >= 0.175).output("ct.3_a", "ct.3_a : max. width of ring-shaped mcon : 0.175um") + ringMCON.not(areaid_sl).output("ct.3_b", "ct.3_b: ring-shaped mcon must be enclosed by areaid_sl") +end +mconnotace.not(li).output("ct.4", "ct.4 : mcon should covered by li") +log("END: 67/44 (mcon)") + +# m1 +log("START: 68/20 (m1)") +m1.width(0.14, euclidian).output("m1.1", "m1.1 : min. m1 width : 0.14um") +huge_m1 = m1.sized(-1.5).sized(1.5).snap(0.005) & m1 +non_huge_m1 = m1.edges - huge_m1 +huge_m1 = huge_m1.edges.outside_part(m1.merged) + +non_huge_m1.space(0.14, euclidian).output("m1.2", "m1.2 : min. m1 spacing : 0.14um") + +(huge_m1.separation(non_huge_m1, 0.28, euclidian) + huge_m1.space(0.28, euclidian)).output("m1.3ab", "m1.3ab : min. 3um.m1 spacing m1 : 0.28um") + +#not_in_cell6 = layout(source.cell_obj).select("-s8cell_ee_plus_sseln_a", "-s8cell_ee_plus_sseln_b", "-s8cell_ee_plus_sselp_a", "-s8cell_ee_plus_sselp_b", "-s8fpls_pl8", "-s8fs_cmux4_fm") +not_in_cell6 = layout(source.cell_obj).select("-s8cell_ee_plus_sseln_a", "-s8cell_ee_plus_sseln_b", "-s8cell_ee_plus_sselp_a", "-s8cell_ee_plus_sselp_b", "-s8fs_cmux4_fm") +not_in_cell6_m1 = not_in_cell6.input(m1_wildcard) + +not_in_cell6_m1.enclosing(mconnotace, 0.03, euclidian).output("791_m1.4", "791_m1.4 : min. m1 enclosure of mcon : 0.03um") +mconnotace.not(m1).output("m1.4", "m1.4 : mcon periphery must be enclosed by m1") +in_cell6 = layout(source.cell_obj).select("-*", "+s8cell_ee_plus_sseln_a", "+s8cell_ee_plus_sseln_b", "+s8cell_ee_plus_sselp_a", "+s8cell_ee_plus_sselp_b", "+s8fpls_pl8", "+s8fs_cmux4_fm") +in_cell6_m1 = in_cell6.input(m1_wildcard) +in_cell6_m1.enclosing(mcon, 0.005, euclidian).output("m1.4a", "m1.4a : min. m1 enclosure of mcon for specific cells : 0.005um") + +in_cell6_m1.not(m1).output('m1.4a_a', 'm1.4a_a : mcon periph must be enclosed by met1 for specific cells') + +m1.with_area(0..0.083).output("m1.6", "m1.6 : min. m1 area : 0.083um²") + +m1.holes.with_area(0..0.14).output("m1.7", "m1.7 : min. m1 with holes area : 0.14um²") +if FLOATING_MET + m1.not_interacting(via.or(mcon)).output("m1.x", "floating met1, must interact with via1") +end + +if backend_flow = AL + #Could flag false positive, fix would be to add .rectangles for m1 + mconnotace_edges_with_less_enclosure_m1 = m1.enclosing(mconnotace, 0.06, projection).second_edges + error_corners_m1 = mconnotace_edges_with_less_enclosure_m1.width(angle_limit(100.0), 1.dbu) + mconnotace_interact_m1 = mconnotace.interacting(error_corners_m1.polygons(1.dbu)) + mconnotace_interact_m1.output("m1.5", "m1.5 : min. m1 enclosure of mcon of 2 adjacent edges : 0.06um") +end +log("END: 68/20 (m1)") + +# via +log("START: 68/44 (via)") +if backend_flow = AL + if SEAL + ringVIA = via.drc(with_holes > 0) + rectVIA = via.not(ringVIA) + else + rectVIA = via + end + + via_not_mt = rectVIA.not(areaid_mt) + + via_not_mt.non_rectangles.output("via.1a", "via.1a : via outside of moduleCut should be rectangular") + via_not_mt.width(0.15, euclidian).output("via.1a_a", "via.1a_a : min. width of via outside of moduleCut : 0.15um") + # via_not_mt.edges.without_length(nil, 0.15 + 1.dbu).output("via.1a_b", "via.1a_b : maximum length of via : 0.15um") + via_not_mt.drc(length > 0.15).output("via.1a_b", "via.1a_b : maximum length of via : 0.15um") + + via.space(0.17, euclidian).output("via.2", "via.2 : min. via spacing : 0.17um") + + if SEAL + ringVIA.width(0.2, euclidian).output("via.3", "via.3 : min. width of ring-shaped via : 0.2um") + ringVIA.drc(width >= 0.205).output("via.3_a", "via.3_a : max. width of ring-shaped via : 0.205um") + ringVIA.not(areaid_sl).output("via.3_b", "via.3_b: ring-shaped via must be enclosed by areaid_sl") + end + + m1.edges.enclosing(rectVIA.drc(width == 0.15), 0.055, euclidian).output("via.4a", "via.4a : min. m1 enclosure of 0.15um via : 0.055um") + rectVIA.squares.drc(width == 0.15).not(m1).output("via.4a_a", "via.4a_a : 0.15um via must be enclosed by met1") + + via1_edges_with_less_enclosure_m1 = m1.edges.enclosing(rectVIA.drc(width == 0.15), 0.085, projection).second_edges + error_corners_via1 = via1_edges_with_less_enclosure_m1.width(angle_limit(100.0), 1.dbu) + via2_interact = via.interacting(error_corners_via1.polygons(1.dbu)) + via2_interact.output("via.5a", "via.5a : min. m1 enclosure of 0.15um via of 2 adjacent edges : 0.085um") + +end +log("END: 68/44 (via)") + +# m2 +log("START: 69/20 (m2)") +m2.width(0.14, euclidian).output("m2.1", "m2.1 : min. m2 width : 0.14um") + +huge_m2 = m2.sized(-1.5).sized(1.5).snap(0.005) & m2 +non_huge_m2 = m2.edges - huge_m2 +huge_m2 = huge_m2.edges.outside_part(m2.merged) +via_outside_periphery = via.not(areaid_ce) + +non_huge_m2.space(0.14, euclidian).output("m2.2", "m2.2 : min. m2 spacing : 0.14um") + +(huge_m2.separation(non_huge_m2, 0.28, euclidian) + huge_m2.space(0.28, euclidian)).output("m2.3ab", "m2.3ab : min. 3um.m2 spacing m2 : 0.28um") + +m2.with_area(0..0.0676).output("m2.6", "m2.6 : min. m2 area : 0.0676um²") +m2.holes.with_area(0..0.14).output("m2.7", "m2.7 : min. m2 holes area : 0.14um²") +if FLOATING_MET + m2.not_interacting(via.or(via2)).output("m2.x", "floating met2, must interact with via1 or via2") +end +if backend_flow = AL + m2.enclosing(via_outside_periphery, 0.055, euclidian).output("m2.4", "m2.4 : min. m2 enclosure of via : 0.055um") + via_outside_periphery.not(m2).output("m2.4_a", "m2.4_a : via in periphery must be enclosed by met2") + via_edges_with_less_enclosure_m2 = m2.enclosing(via, 0.085, projection).second_edges + error_corners = via_edges_with_less_enclosure_m2.width(angle_limit(100.0), 1.dbu) + via_interact = via.interacting(error_corners.polygons(1.dbu)) + via_interact.output("m2.5", "m2.5 : min. m2 enclosure of via of 2 adjacent edges : 0.085um") + +end +log("END: 69/20 (m2)") + +# via2 +log("START: 69/44 (via2)") +if backend_flow = AL + if SEAL + ringVIA2 = via2.drc(with_holes > 0) + rectVIA2 = via2.not(ringVIA2) + else + rectVIA2 = via2 + end + + via2_not_mt = rectVIA2.not(areaid_mt) + via2_not_mt.non_rectangles.output("via2.1a", "via2.1a : via2 outside of moduleCut should be rectangular") + via2_not_mt.width(0.2, euclidian).output("via2.1a_a", "via2.1a_a : min. width of via2 outside of moduleCut : 0.2um") + via2_not_mt.edges.without_length(nil, 0.2 + 1.dbu).output("via2.1a_b", "via2.1a_b : maximum length of via2 : 0.2um") + via2.space(0.2, euclidian).output("via2.2", "via2.2 : min. via2 spacing : 0.2um") + + if SEAL + ringVIA2.width(0.2, euclidian).output("via2.3", "via2.3 : min. width of ring-shaped via2 : 0.2um") + ringVIA2.drc(width >= 0.205).output("via2.3_a", "via2.3_a : max. width of ring-shaped via2 : 0.205um") + ringVIA2.not(areaid_sl).output("via2.3_b", "via2.3_b: ring-shaped via2 must be enclosed by areaid_sl") + end + + m2.enclosing(via2, 0.04, euclidian).output("via2.4", "via2.4 : min. m2 enclosure of via2 : 0.04um") + via2.not(m2).output("via2.4_a", "via2.4_a : via must be enclosed by met2") + + via2_edges_with_less_enclosure = m2.enclosing(via2, 0.085, projection).second_edges + error_corners = via2_edges_with_less_enclosure.width(angle_limit(100.0), 1.dbu) + via2_interact = via2.interacting(error_corners.polygons(1.dbu)) + via2_interact.output("via2.5", "via2.5 : min. m2 enclosure of via2 of 2 adjacent edges : 0.085um") +end +log("END: 69/44 (via2)") + +# m3 +log("START: 70/20 (m3)") +m3.width(0.3, euclidian).output("m3.1", "m3.1 : min. m3 width : 0.3um") + +huge_m3 = m3.sized(-1.5).sized(1.5).snap(0.005) & m3 +non_huge_m3 = m3.edges - huge_m3 +huge_m3 = huge_m3.edges.outside_part(m3.merged) + +non_huge_m3.space(0.3, euclidian).output("m3.2", "m3.2 : min. m3 spacing : 0.3um") + +(huge_m3.separation(non_huge_m3, 0.4, euclidian) + huge_m3.space(0.4, euclidian)).output("m3.3cd", "m3.3cd : min. 3um.m3 spacing m3 : 0.4um") +if FLOATING_MET + m3.not_interacting(via2.or(via3)).output("m3.x", "floating met3, must interact with via2 or via3") +end +if backend_flow = AL + m3.enclosing(via2, 0.065, euclidian).output("m3.4", "m3.4 : min. m3 enclosure of via2 : 0.065um") + via2.not(m3).output("m3.4_a", "m3.4_a : via2 must be enclosed by met3") +end +log("END: 70/20 (m3)") + +# via3 +log("START: 70/44 (via3)") +if backend_flow = AL + if SEAL + ringVIA3 = via3.drc(with_holes > 0) + rectVIA3 = via3.not(ringVIA3) + else + rectVIA3 = via3 + end + + via3_not_mt = rectVIA3.not(areaid_mt) + via3_not_mt.non_rectangles.output("via3.1", "via3.1 : via3 outside of moduleCut should be rectangular") + via3_not_mt.width(0.2, euclidian).output("via3.1_a", "via3.1_a : min. width of via3 outside of moduleCut : 0.2um") + via3_not_mt.edges.without_length(nil, 0.2 + 1.dbu).output("via3.1_b", "via3.1_b : maximum length of via3 : 0.2um") + + via3.space(0.2, euclidian).output("via3.2", "via3.2 : min. via3 spacing : 0.2um") + m3.enclosing(via3, 0.06, euclidian).output("via3.4", "via3.4 : min. m3 enclosure of via3 : 0.06um") + rectVIA3.not(m3).output("via3.4_a", "via3.4_a : non-ring via3 must be enclosed by met3") + + via_edges_with_less_enclosure = m3.enclosing(via3, 0.09, projection).second_edges + error_corners = via_edges_with_less_enclosure.width(angle_limit(100.0), 1.dbu) + via3_interact = via3.interacting(error_corners.polygons(1.dbu)) + via3_interact.output("via3.5", "via3.5 : min. m3 enclosure of via3 of 2 adjacent edges : 0.09um") +end +log("END: 70/44 (via3)") + +# m4 +log("START: 71/20 (m4)") +m4.width(0.3, euclidian).output("m4.1", "m4.1 : min. m4 width : 0.3um") + +huge_m4 = m4.sized(-1.5).sized(1.5).snap(0.005) & m4 +non_huge_m4 = m4.edges - huge_m4 +huge_m4 = huge_m4.edges.outside_part(m4.merged) + +non_huge_m4.space(0.3, euclidian).output("m4.2", "m4.2 : min. m4 spacing : 0.3um") + +m4.with_area(0..0.240).output("m4.4a", "m4.4a : min. m4 area : 0.240um²") + +(huge_m4.separation(non_huge_m4, 0.4, euclidian) + huge_m4.space(0.4, euclidian)).output("m4.5ab", "m4.5ab : min. 3um.m4 spacing m4 : 0.4um") +if FLOATING_MET + m4.not_interacting(via3.or(via4)).output("m4.x", "floating met3, must interact with via3 or via4") +end +if backend_flow = AL + m4.enclosing(via3, 0.065, euclidian).output("m4.3", "m4.3 : min. m4 enclosure of via3 : 0.065um") + via3.not(m4).output("m4.3_a", "m4.3_a : via3 must be enclosed by met4") +end +log("END: 71/20 (m4)") + +# via4 +log("START: 71/44 (via4)") +if SEAL + ringVIA4 = via4.drc(with_holes > 0) + rectVIA4 = via4.not(ringVIA4) +else + rectVIA4 = via4 +end + +via4_not_mt = rectVIA4.not(areaid_mt) +via4_not_mt.non_rectangles.output("via4.1", "via4.1 : via4 outside of moduleCut should be rectangular") +rectVIA4.width(0.8, euclidian).output("via4.1_a", "via4.1_a : min. width of via4 outside of moduleCut : 0.8um") +rectVIA4.drc(length > 0.8).output("via4.1_b", "via4.1_b : maximum length of via4 : 0.8um") + +via4.space(0.8, euclidian).polygons.output("via4.2", "via4.2 : min. via4 spacing : 0.8um") + +if SEAL + ringVIA4.width(0.8, euclidian).output("via4.3", "via4.3 : min. width of ring-shaped via4 : 0.8um") + ringVIA4.drc(width >= 0.805).output("via4.3_a", "via4.3_a : max. width of ring-shaped via4 : 0.805um") + ringVIA4.not(areaid_sl).output("via4.3_b", "via4.3_b: ring-shaped via4 must be enclosed by areaid_sl") +end + +m4.enclosing(via4, 0.19, euclidian).output("via4.4", "via4.4 : min. m4 enclosure of via4 : 0.19um") +rectVIA4.not(m4).output("via4.4_a", "via4.4_a : m4 must enclose all via4") +log("END: 71/44 (via4)") + +# m5 +log("START: 72/20 (m5)") +m5.width(1.6, euclidian).output("m5.1", "m5.1 : min. m5 width : 1.6um") + +m5.space(1.6, euclidian).output("m5.2", "m5.2 : min. m5 spacing : 1.6um") + +m5.enclosing(via4, 0.31, euclidian).output("m5.3", "m5.3 : min. m5 enclosure of via4 : 0.31um") +via4.not(m5).output("m5.3_a", "m5.3_a : via must be enclosed by m5") +if FLOATING_MET + m5.not_interacting(via4).output("m5.x", "floating met5, must interact with via4") +end +m5.with_area(0..4.0).output("m5.4", "m5.4 : min. m5 area : 4.0um²") +log("END: 72/20 (m5)") + +# pad +log("START: 76/20 (pad)") +pad.space(1.27, euclidian).output("pad.2", "pad.2 : min. pad spacing : 1.27um") +log("END: 76/20 (pad)") + +end #BEOL + +if FEOL +log("FEOL section") + +# hvi +log("START: 75/20 (hvi)") +hvi_peri = hvi.not(areaid_ce) +hvi_peri.width(0.6, euclidian).output("hvi.1", "hvi.1 : min. hvi width : 0.6um") +hvi_peri.space(0.7, euclidian).output("hvi.2a", "hvi.2a : min. hvi spacing : 0.7um") +log("END: 75/20 (hvi)") + +# hvntm +log("START: 125/20 (hvntm)") +hvntm_peri = hvntm.not(areaid_ce) +hvntm_peri.width(0.7, euclidian).output("hvntm.1", "hvntm.1 : min. hvntm width : 0.7um") +hvntm_peri.space(0.7, euclidian).output("hvntm.2", "hvntm.2 : min. hvntm spacing : 0.7um") +log("END: 125/20 (hvntm)") + +end #FEOL + + +if OFFGRID +log("OFFGRID-ANGLES section") + +dnwell.ongrid(0.005).output("dnwell_OFFGRID", "x.1b : OFFGRID vertex on dnwell") +dnwell.with_angle(0 .. 45).output("dnwell_angle", "x.3a : non 45 degree angle dnwell") +nwell.ongrid(0.005).output("nwell_OFFGRID", "x.1b : OFFGRID vertex on nwell") +nwell.with_angle(0 .. 45).output("nwell_angle", "x.3a : non 45 degree angle nwell") +pwbm.ongrid(0.005).output("pwbm_OFFGRID", "x.1b : OFFGRID vertex on pwbm") +pwbm.with_angle(0 .. 45).output("pwbm_angle", "x.3a : non 45 degree angle pwbm") +pwde.ongrid(0.005).output("pwde_OFFGRID", "x.1b : OFFGRID vertex on pwde") +pwde.with_angle(0 .. 45).output("pwde_angle", "x.3a : non 45 degree angle pwde") +hvtp.ongrid(0.005).output("hvtp_OFFGRID", "x.1b : OFFGRID vertex on hvtp") +hvtp.with_angle(0 .. 45).output("hvtp_angle", "x.3a : non 45 degree angle hvtp") +hvtr.ongrid(0.005).output("hvtr_OFFGRID", "x.1b : OFFGRID vertex on hvtr") +hvtr.with_angle(0 .. 45).output("hvtr_angle", "x.3a : non 45 degree angle hvtr") +lvtn.ongrid(0.005).output("lvtn_OFFGRID", "x.1b : OFFGRID vertex on lvtn") +lvtn.with_angle(0 .. 45).output("lvtn_angle", "x.3a : non 45 degree angle lvtn") +ncm.ongrid(0.005).output("ncm_OFFGRID", "x.1b : OFFGRID vertex on ncm") +ncm.with_angle(0 .. 45).output("ncm_angle", "x.3a : non 45 degree angle ncm") +diff.ongrid(0.005).output("diff_OFFGRID", "x.1b : OFFGRID vertex on diff") +tap.ongrid(0.005).output("tap_OFFGRID", "x.1b : OFFGRID vertex on tap") +diff.not(areaid_en.and(uhvi)).with_angle(0 .. 90).output("diff_angle", "x.2 : non 90 degree angle diff") +diff.and(areaid_en.and(uhvi)).with_angle(0 .. 45).output("diff_angle", "x.2c : non 45 degree angle diff") +tap.not(areaid_en.and(uhvi)).with_angle(0 .. 90).output("tap_angle", "x.2 : non 90 degree angle tap") +tap.and(areaid_en.and(uhvi)).with_angle(0 .. 45).output("tap_angle", "x.2c : non 45 degree angle tap") +tunm.ongrid(0.005).output("tunm_OFFGRID", "x.1b : OFFGRID vertex on tunm") +tunm.with_angle(0 .. 45).output("tunm_angle", "x.3a : non 45 degree angle tunm") +poly.ongrid(0.005).output("poly_OFFGRID", "x.1b : OFFGRID vertex on poly") +poly.with_angle(0 .. 90).output("poly_angle", "x.2 : non 90 degree angle poly") +rpm.ongrid(0.005).output("rpm_OFFGRID", "x.1b : OFFGRID vertex on rpm") +rpm.with_angle(0 .. 45).output("rpm_angle", "x.3a : non 45 degree angle rpm") +npc.ongrid(0.005).output("npc_OFFGRID", "x.1b : OFFGRID vertex on npc") +npc.with_angle(0 .. 45).output("npc_angle", "x.3a : non 45 degree angle npc") +nsdm.ongrid(0.005).output("nsdm_OFFGRID", "x.1b : OFFGRID vertex on nsdm") +nsdm.with_angle(0 .. 45).output("nsdm_angle", "x.3a : non 45 degree angle nsdm") +psdm.ongrid(0.005).output("psdm_OFFGRID", "x.1b : OFFGRID vertex on psdm") +psdm.with_angle(0 .. 45).output("psdm_angle", "x.3a : non 45 degree angle psdm") +licon.ongrid(0.005).output("licon_OFFGRID", "x.1b : OFFGRID vertex on licon") +licon.with_angle(0 .. 90).output("licon_angle", "x.2 : non 90 degree angle licon") +li.ongrid(0.005).output("li_OFFGRID", "x.1b : OFFGRID vertex on li") +li.with_angle(0 .. 45).output("li_angle", "x.3a : non 45 degree angle li") +mcon.ongrid(0.005).output("ct_OFFGRID", "x.1b : OFFGRID vertex on mcon") +mcon.with_angle(0 .. 90).output("ct_angle", "x.2 : non 90 degree angle mcon") +vpp.ongrid(0.005).output("vpp_OFFGRID", "x.1b : OFFGRID vertex on vpp") +vpp.with_angle(0 .. 45).output("vpp_angle", "x.3a : non 45 degree angle vpp") +m1.ongrid(0.005).output("m1_OFFGRID", "x.1b : OFFGRID vertex on m1") +m1.with_angle(0 .. 45).output("m1_angle", "x.3a : non 45 degree angle m1") +via.ongrid(0.005).output("via_OFFGRID", "x.1b : OFFGRID vertex on via") +via.with_angle(0 .. 90).output("via_angle", "x.2 : non 90 degree angle via") +m2.ongrid(0.005).output("m2_OFFGRID", "x.1b : OFFGRID vertex on m2") +m2.with_angle(0 .. 45).output("m2_angle", "x.3a : non 45 degree angle m2") +via2.ongrid(0.005).output("via2_OFFGRID", "x.1b : OFFGRID vertex on via2") +via2.with_angle(0 .. 90).output("via2_angle", "x.2 : non 90 degree angle via2") +m3.ongrid(0.005).output("m3_OFFGRID", "x.1b : OFFGRID vertex on m3") +m3.with_angle(0 .. 45).output("m3_angle", "x.3a : non 45 degree angle m3") +via3.ongrid(0.005).output("via3_OFFGRID", "x.1b : OFFGRID vertex on via3") +via3.with_angle(0 .. 90).output("via3_angle", "x.2 : non 90 degree angle via3") +nsm.ongrid(0.005).output("nsm_OFFGRID", "x.1b : OFFGRID vertex on nsm") +nsm.with_angle(0 .. 45).output("nsm_angle", "x.3a : non 45 degree angle nsm") +m4.ongrid(0.005).output("m4_OFFGRID", "x.1b : OFFGRID vertex on m4") +m4.with_angle(0 .. 45).output("m4_angle", "x.3a : non 45 degree angle m4") +via4.ongrid(0.005).output("via4_OFFGRID", "x.1b : OFFGRID vertex on via4") +via4.with_angle(0 .. 90).output("via4_angle", "x.2 : non 90 degree angle via4") +m5.ongrid(0.005).output("m5_OFFGRID", "x.1b : OFFGRID vertex on m5") +m5.with_angle(0 .. 45).output("m5_angle", "x.3a : non 45 degree angle m5") +pad.ongrid(0.005).output("pad_OFFGRID", "x.1b : OFFGRID vertex on pad") +pad.with_angle(0 .. 45).output("pad_angle", "x.3a : non 45 degree angle pad") +mf.ongrid(0.005).output("mf_OFFGRID", "x.1b : OFFGRID vertex on mf") +mf.with_angle(0 .. 90).output("mf_angle", "x.2 : non 90 degree angle mf") +hvi.ongrid(0.005).output("hvi_OFFGRID", "x.1b : OFFGRID vertex on hvi") +hvi.with_angle(0 .. 45).output("hvi_angle", "x.3a : non 45 degree angle hvi") +hvntm.ongrid(0.005).output("hvntm_OFFGRID", "x.1b : OFFGRID vertex on hvntm") +hvntm.with_angle(0 .. 45).output("hvntm_angle", "x.3a : non 45 degree angle hvntm") +vhvi.ongrid(0.005).output("vhvi_OFFGRID", "x.1b : OFFGRID vertex on vhvi") +vhvi.with_angle(0 .. 45).output("vhvi_angle", "x.3a : non 45 degree angle vhvi") +uhvi.ongrid(0.005).output("uhvi_OFFGRID", "x.1b : OFFGRID vertex on uhvi") +uhvi.with_angle(0 .. 45).output("uhvi_angle", "x.3a : non 45 degree angle uhvi") +pwell_rs.ongrid(0.005).output("pwell_rs_OFFGRID", "x.1b : OFFGRID vertex on pwell_rs") +pwell_rs.with_angle(0 .. 45).output("pwell_rs_angle", "x.3a : non 45 degree angle pwell_rs") +areaid_re.ongrid(0.005).output("areaid_re_OFFGRID", "x.1b : OFFGRID vertex on areaid.re") + +end #OFFGRID +logger.info(" ") +logger.info("Cell exclusion list:") +logger.info(" rule | cell") +logger.info(" nwell.6 | sky130_fd_io__gpiov2_amux, sky130_fd_io__simple_pad_and_busses, sram") +logger.info(" nsd.1 | sram") +logger.info(" nsd.2 | sram") +logger.info(" psd.1 | sram") +logger.info(" psd.2 | sram") +logger.info(" ") +logger.info("release #{release}")