EUV Lithography Multiblocks and Machines#403
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littlecube8152 wants to merge 13 commits intoSymmetricDevs:mainfrom
Open
EUV Lithography Multiblocks and Machines#403littlecube8152 wants to merge 13 commits intoSymmetricDevs:mainfrom
littlecube8152 wants to merge 13 commits intoSymmetricDevs:mainfrom
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honestly I don't know why it's glass in the first place
bruberu
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Jul 16, 2025
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I should note that there is now a second recipe for the polishing machine in polishing metallurgical rolls, so I would reconsider the renaming of the polishing machine. Also, is this compliant with the new requirements for EV circuits?
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What
This PR adds all EUV lithography related single block machines and multiblocks.
Outcome
polishing_machineis renamed to wafer spinnerwafer_spinnerto accommodate wider recipessputter_deposition, designed to support various PVD methods (with not-comsuables as required apparatuses)euv_lithographer, along with many multiblocks components addedPotential Compatibility Issues
polishing_machinewill be broken.polishing_machineneed to be changed towafer_spinner.Additional Notes
Do we actually register the EUV multiblock? It is never going to be used so should I remove that to prevent missing registry when it is gone?