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Simulations of ion beam spot size and methods of measurement, specifically in the comparison of error function fitting and 80:20 rule in knife edge measurements as a method of approximating imaging resolution and spot size of focussed ion beams.

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Spot_size

Simulations of ion beam spot size and methods of measurement, specifically in the comparison of error function fitting and 80:20 rule in knife edge measurements as a method of approximating imaging resolution and spot size of focussed ion beams.

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Simulations of ion beam spot size and methods of measurement, specifically in the comparison of error function fitting and 80:20 rule in knife edge measurements as a method of approximating imaging resolution and spot size of focussed ion beams.

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